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Microsystem Technologies

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01-02-2007 | Technical paper

Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask

Authors: Yigui Li, Susumu Sugiyama

Published in: Microsystem Technologies | Issue 3-4/2007

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Abstract

We demonstrate experimentally the X-ray lithography technique to fabricate microgratings on a PMMA plate and on curved surfaces such as PMMA cylinder lens surfaces with X-ray lithography by copper mesh as mask. Some gratings with 12.7 μm pitches on the plate and on PMMA curved surface with large area (10 mm × 10 mm) by vertically moving or rotating the resist stage exposure are realized.

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Title: Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
Authors: Yigui Li
Susumu Sugiyama
Publication date: 01-02-2007
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 3-4/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-006-0196-x

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