Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 5/2020

04-11-2019 | Technical Paper

Impact of design parameters on working stability of the electrothermal V-shaped actuator

Authors: Kien Trung Hoang, Dzung Tien Nguyen, Phuc Hong Pham

Published in: Microsystem Technologies | Issue 5/2020

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

This paper mentions a detail calculation of the equivalent dynamic parameters in differential equations of motion of the electrothermal V-shaped actuator. A heat transfer model for a thin beam (including the dependence of material properties on the temperature) is applied in order to solve more exactly temperature distribution and displacement of V-shaped beam system. Comparing the values of displacement in both calculation and simulation confirmed a higher accuracy of proposed equations. Moreover, a related formula between the minimum conversion stiffness and driving voltage amplitude is analyzed and examined to avoid the buckling phenomenon may occur in V-shaped beam system while working at a high voltage.
previous article Regression test case selection and prioritization for object oriented software
next article Passive element free variation aware decision circuit for 40 Gb/s CDR application

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Bullis WM, Brewer FH, Kolstad CD, Swartzendruber LJ (1968) Temperature coefficient of resistivity of silicon and germanium near room temperature. Solid-State Electron 11(7):639–646CrossRef
Chiorean R-S (2015) Electro-thermo-mechanical modeling of V-beam actuators. Proc Technol 19:56–61CrossRef
Enikov ET, Kedar SS, Lazarov KV (2004) Analytical and experimental analysis of folded beam and V-shaped thermal microactuators. In: SEM 10th international congress expo. Costa Mesa, California
Espinosa HD, Zhu Y, Moldovan N (2007) Design and operation of a MEMS-based material testing system for nanomechanical characterization. J Microelectromech Syst 16(5):1219–1231CrossRef
Geisberger A, Kadylak D, Ellis M (2006) A silicon electrothermal rotational micro motor measuring one cubic millimeter. J Micromech Microeng 16(10):1943–1950CrossRef
Gere JM (2004) Mechanics of materials, 6th edn. Thomson, Stamford
Hu T, Zhao Y, Li X, Zhao Y, Bai Y (2017) Integration design of MEMS electro-thermal safety-and-arming devices. Microsyst Technol 23(4):953–958CrossRef
Hull R (1999) Properties of crystalline silicon. INSPEC, London
Li RG, Huang QA, Li WH (2008) A nodal analysis method for simulating the behavior of electrothermal microactuators. Microsyst Technol 14(1):119–129CrossRef
Lott CD, McLain TW, Harb JN, Howell LL (2002) Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator. Sens Actuators A Phys 101(1–2):239–250CrossRef
Maloney JM, Schreiber DS, Devoe DL (2004) Large-force electrothermal linear micromotors. J Micromech Microeng 14(2):226–234CrossRef
Mayyas M, Stephanou H (2009) Electrothermoelastic modeling of MEMS gripper. Microsyst Technol 15(4):637–646CrossRef
Pham PH, Hoang KT, Nguyen DQ (2019) Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density. Microsyst Technol 25(8):3111–3118CrossRef
Shan T, Qi X, Cui L, Zhou X (2017) Thermal behavior modeling and characteristics analysis of electrothermal microactuators. Microsyst Technol 23(7):2629–2640CrossRef
Shivhare P, Uma G, Umapathy M (2016) Design enhancement of a chevron electrothermally actuated microgripper for improved gripping performance. Microsyst Technol 22(11):2623–2631CrossRef
Zhang Z, Yu Y, Liu X, Zhang X (2017a) Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators. Microsyst Technol 23(8):3775–3789CrossRef
Zhang Z, Zhang W, Wu Q, Yu Y, Liu X, Zhang X (2017b) Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators. J Micromech Microeng 27(1):015023CrossRef
Zhang Z, Yu Y, Zhang X (2018) Vibration analysis of V-shaped beam electrothermal microactuators. In: Proceeding 2nd international conference on cybernetics, robotics and control. CRC 2017, pp 80–84
Zhao Y-L, Hu T-J, Li X-Y, Jiang Z-D, Ren W, Bai Y-W (2015) Design and characterization of a large displacement electro-thermal actuator for a new kind of safety-and-arming device. Energy Harvest Syst 2(3–4):143–148
Zhu Y, Corigliano A, Espinosa HD (2006) A thermal actuator for nanoscale in situ microscopy testing: design and characterization. J Micromech Microeng 16(2):242–253CrossRef
Metadata
Title
Impact of design parameters on working stability of the electrothermal V-shaped actuator
Authors
Kien Trung Hoang
Dzung Tien Nguyen
Phuc Hong Pham
Publication date
04-11-2019
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 5/2020
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-019-04682-y

Other articles of this Issue 5/2020

Microsystem Technologies 5/2020 Go to the issue

Technical Paper

Development and control of articulated amphibious spherical robot

Technical Paper

Optimal location and parametric settings of FACTS devices based on JAYA blended moth flame optimization for transmission loss minimization in power systems

Technical Paper

Evolutionary based hybrid GA for solving multi-objective grid scheduling problem

Technical Paper

Investigation of honey as the electrolyte gate dielectrics of field effect transistors

Technical Paper

Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation

Technical Paper

Amalgamation of aligned carbon nanostructures at low temperature and the synthesis of vertically aligned carbon nanofibers (CNFs)