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2008 | OriginalPaper | Chapter

18. Micro/Nanorobots

Authors : Bradley J. Nelson, Prof, Lixin Dong, Prof, Fumihito Arai, Prof

Published in: Springer Handbook of Robotics

Publisher: Springer Berlin Heidelberg

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Abstract

The field of microrobotics covers the robotic manipulation of objects with dimensions in the millimeter to micron range as well as the design and fabrication of autonomous robotic agents that fall within this size range. Nanorobotics is defined in the same way only for dimensions smaller than a micron. With the ability to position and orient objects with micron- and nanometer-scale dimensions, manipulation at each of these scales is a promising way to enable the assembly of micro- and nanosystems, including micro- and nanorobots.
This chapter overviews the state of the art of both micro- and nanorobotics, outlines scaling effects, actuation, and sensing and fabrication at these scales, and focuses on micro- and nanorobotic manipulation systems and their application in microassembly, biotechnology, and the construction and characterization of micro and nanoelectromechanical systems (MEMS/NEMS). Material science, biotechnology, and micro- and nanoelectronics will also benefit from advances in these areas of robotics.

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Metadata
Title
Micro/Nanorobots
Authors
Bradley J. Nelson, Prof
Lixin Dong, Prof
Fumihito Arai, Prof
Copyright Year
2008
DOI
https://doi.org/10.1007/978-3-540-30301-5_19