Micro-specific design flow for tool-based microtechnologies

Design of systems and components being produced with tool-based microtechnologies is strongly driven by technology. Thus, there are multitechnological influences from production, materials or micro-specific effects, which restrictively affect design and have to be considered. Under special regard of these peculiarities and in context with live cycle stages of tool-based microtechnological products, a design flow is presented. This incorporates a new design model, called sickle model visualizing the specific aspects when designing products of tool-based microtechnology. In order to support the design process, design rules are used to transfer knowledge from subsequent and adjacent life cycle stages to the current design stage.