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Microsystem Technologies
Published in: Microsystem Technologies 3-4/2007

01-02-2007 | Technical Paper

Microlens fabrication using an etched glass master

Authors: P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, H. J. Cho

Published in: Microsystem Technologies | Issue 3-4/2007

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Abstract

This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.
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Literature
Daly D, Steven RF, Hutley CM, Davies N (1990) The manufacture of microlenses by melting photoresist. Meas Sci Technol 1:759–766CrossRef
Jeong KH, Lee LP (2002) A new method of increasing numerical aperture of microlens for biophotonic MEMS presented at Microtechnologies in Medicine and Biology In: 2nd Annual International IEEE-EMB special topic conference
Morgan B, Waits CM, Krizmanic J, Ghodssi R (2004) Development of a deep silicon phase fresnel lens using gray-scale lithography and deep reactive ion etching. J Microelectromech Syst 13:113–120CrossRef
Nilsson D, Balslev S Kristensen A (2004) A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC). J Micromech Microeng 15:296–300CrossRef
Park EH, Kim MJ, Kwon YS (1999) New fabrication technology of convex and concave microlens using UVcuring method. Presented at Lasers and Electro-Optics Society 1999 In: 12th Annual Meeting. LEOS ‘99,
Metadata
Title
Microlens fabrication using an etched glass master
Authors
P. Zhang
G. Londe
J. Sung
E. Johnson
M. Lee
H. J. Cho
Publication date
01-02-2007
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 3-4/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-006-0217-9

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