Fabrication of a spiral microcoil using a 3D-LIGA process

LIGA processes have been developed generally in the 2.5D world. We introduced techniques of 3D X-ray lithography and worm injection molding with a unscrewing release mechanism, and succeeded in the development to three dimensions of LIGA process. We called this technology 3D-LIGA process, and came to be able to fabricate the plastic molded product with a spiral microstructure. Furthermore, we succeeded in the trial production of a spiral microcoil using 3D-LIGA process and metallization technique combining flat and smooth electroplating with a leveling agent and an isotropic chemical etching. The diameter of this microcoil was 0.5 mm and the length was 1 mm. The width of the Cu coil line was 10 μm, and the pitch was 20 μm. Moreover, we measured characteristics of this microcoil as an inductor. The inductance and the quality factor at the frequency of 1 GHz were 91 nH and 5.8, respectively. This is the first time successful fabrication of an electric device with a 3D form like a spiral microcoil using the 3D-LIGA process has been achieved.