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Microsystem Technologies
Published in: Microsystem Technologies 3-4/2007

01-02-2007 | Editorial

HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005

Authors: Tai Hun Kwon, Bernd Michel

Published in: Microsystem Technologies | Issue 3-4/2007

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Excerpt

The HARMST 2005, the 6th biennial international workshop on High Aspect Ratio Micro-Structure Technology, was successfully held in Gyeongju, South Korea during 10–13 June 2005. It was the follow-up of previous workshops held in Karlsruhe, Germany in 1995, Madison, Wisconsin in 1997, Chiba, Japan in 1999, Baden-Baden in 2001, Monterey, California in 2003. This time, the Research Center for Micro Mechanical Systems (MMS), established in Pohang University of Science and Technology (POSTECH), took the organizing job of this 6th workshop, under the auspices of the Korean Society of Mechanical Engineers, in view of the invaluable X-ray Beam line dedicated to LIGA process built in Pohang Acceleration Laboratory (PAL) of POSTECH. …
next article Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography

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Metadata
Title
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
Authors
Tai Hun Kwon
Bernd Michel
Publication date
01-02-2007
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 3-4/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-006-0229-5

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