Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 3-4/2007

01-02-2007 | Technical paper

Design and UV-LIGA microfabrication of an electro-statically actuated power relay

Authors: S. J. Jeong, W. Wang

Published in: Microsystem Technologies | Issue 3-4/2007

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than two SU-8 strips used both as electrical insulators mechanical connectors, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating micro electro mechanical system power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.
previous article Design and fabrication of a SU-8 based electrostatic microactuator
next article Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Drake J et al (1995) An electrostatically actuated micro-relay. Transducer ‘95, Eurosensors IX, vol 2. pp 380–383, June 25–29, 1995
Gretillat M-A et al. (1994) Electrostatic polysilicon microrelays integrated with MOSFETs. In: Proceedings of micro electro mechanical systems workshop, pp 97–101
Hashimoto E et al (1995) Thermally controlled magnetization microrelay. Transducer ‘95, Eurosensors IX, vol 1. p 364, 25–29 June 1995
Rogge B et al (1995) Fully batch fabricated magnetic microactuators using a two layer LIGA process. Transducer ‘95, Eurosensors
Tilmans HAC, Legtenberg R (1994) Electrostatically driven vaccum encapsulated polysilicon resonators, part2, theory and performance. Sens Actuators A 45:67–84CrossRef
Williams JD, Wang W (2004) Microfabrication of an electromagnetic power micro-relay using SU-8 based UV-LIGA technology. Microsyst Technol 10(10):699–705CrossRef
Williams JD, Yang R, Wang W (2005) Numerical simulation and test of a UV-LIGA fabricated electromagnetic micro-relay for power applications. Sens Actuators A Phys 120(1):154–162 DOI information: 10.1016/j.sna.2004.10.034
Yao JJ, Chang MF (1995) A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHZ. Transducer ‘95, Eurosensors IX, vol 2. pp 384–387, 25–29 June 1995
Metadata
Title
Design and UV-LIGA microfabrication of an electro-statically actuated power relay
Authors
S. J. Jeong
W. Wang
Publication date
01-02-2007
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 3-4/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-006-0171-6

Other articles of this Issue 3-4/2007

Microsystem Technologies 3-4/2007 Go to the issue

Technical paper

In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer

Technical Paper

Direct LIGA service for prototyping: status report

Technical Paper

Fabrication of high aspect ratio nano gratings using SR lithography

Technical Paper

Structure quality in deep X-ray lithography applying commercial polyimide-based masks

Technical paper

Effect of seed layer stress on the fabrication of monolithic MEMS microstructure

Technical paper

A new removable resist for high aspect ratio applications