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Microsystem Technologies

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01-02-2007 | Technical Paper

Design and fabrication of a SU-8 based electrostatic microactuator

Authors: Wen Dai, Kun Lian, Wanjun Wang

Published in: Microsystem Technologies | Issue 3-4/2007

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Abstract

Comb-drive microactuator is widely used in MEMS devices and traditionally is made of silicon as structural material using silicon-based fabrication technology. Recent development in UV lithography of SU-8 has made it possible to fabricate the ultra high aspect ratio microstructures with excellent sidewall quality. In this paper, we report a low cost alternative to the silicon-based comb drive by using cured SU-8 polymer as structural material. The microactuator was designed to have a integrated structure without assembly or bonding. A unique integration fabrication process was successfully developed based on UV lithography of SU-8 and selectively metallizing SU-8 polymer structures. Preliminary experimental results have proved the feasibility of the microactuator and the fabrication technology.

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Title: Design and fabrication of a SU-8 based electrostatic microactuator
Authors: Wen Dai
Kun Lian
Wanjun Wang
Publication date: 01-02-2007
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 3-4/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-006-0214-z

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