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Microsystem Technologies
Published in: Microsystem Technologies 1/2013

01-01-2013 | Technical Paper

Modeling and characterization of a SOIMUMP’s hybrid electro thermal actuator

Authors: A. R. Kalaiarasi, S. Hosimin Thilagar

Published in: Microsystem Technologies | Issue 1/2013

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Abstract

A hybrid electro thermal microactuator is designed and its analytical model is developed. An existing hot and cold beam actuator is added with a gold layer of 0.5 μm thickness, so that the performance of the hybrid electro thermal actuator is improved. The analytical model is validated by comparing the results with 3D finite element model. Further the device is fabricated using SOIMUMPs process and characterized to validate the proposed analytical model. The shape of cold beam is also modified such that it improves the displacement. The results obtained from analytical and experimental models are in good agreement.
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Metadata
Title
Modeling and characterization of a SOIMUMP’s hybrid electro thermal actuator
Authors
A. R. Kalaiarasi
S. Hosimin Thilagar
Publication date
01-01-2013
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 1/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1566-1

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