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Microsystem Technologies

Ausgabe 1/2013

Inhalt (18 Artikel)

Technical Paper

Passive mixing of co-flowing slugs in grooved microchannels

S. Hasnain, A. Kumar, S. Ganguly

Technical Paper

A novel capacitive pressure sensor and interface circuitry

Yongtai He, Jinhao Liu, Lei Li, Jinghong He

Technical Paper

Analysis of an in-plane micro-generator with various microcoil shapes

Y. J. Chen, C. T. Pan, Z. H. Liu

Technical Paper

Design and modeling of 2-D photonic crystals based hexagonal triple-nano-ring resonators as biosensors

Chong Pei Ho, Bo Li, Aaron J. Danner, Chengkuo Lee

Technical Paper

Equivalent area nonlinear static and dynamic analysis of electrostatically actuated microstructures

Rakesh Kalyanaraman, Gino Rinaldi, Muthukumaran Packirisamy, Rama Bhat

Technical Paper

Design and fabrication of a silicon probe for surface profilers

Senlin Jiang, Dacheng Zhang, Longtao Lin, Zhenchuan Yang, Qiancheng Zhao, Guizhen Yan

Technical Paper

Testing of MEMS capacitive accelerometer structure through electro-static actuation

Sougata Kumar Kar, K. B. M. Swamy, Banibrata Mukherjee, Siddhartha Sen

Technical Paper

A multipurpose electrothermal microgripper for biological micro-manipulation

Ran Zhang, Jinkui Chu, Haixiang Wang, Zhaopeng Chen

Technical Paper

An effective PDMS microfluidic chip for chemiluminescence detection of cobalt (II) in water

Xueye Chen, Chong Liu, Zheng Xu, Yuzhen Pan, Junshan Liu, Liqun Du

Technical Paper

Cells adhered and cultured on microcantilevers

Chih-Wei Wu, Sheng-Ping Chang, Chang-Jer Wu, Shih-Hao Huang

Technical Paper

Modeling and characterization of a SOIMUMP’s hybrid electro thermal actuator

A. R. Kalaiarasi, S. Hosimin Thilagar

Technical Paper

A high sensitive MEMS capacitive fingerprint sensor using slotted membrane

Bahram Azizollah Ganji, Mojtaba Shams Nateri

Technical Paper

Fabrication and characterization of PECVD silicon nitride for RF MEMS applications

H. U. Rahman, B. C. Johnson, J. C. Mccallum, E. Gauja, R. Ramer

Technical Paper

Monolithic integration of Pb(Zr,Ti)O3 thin film based resonators using a complete dry microfabrication process

Yonggang Jiang, Kensuke Kanda, Yuki Iga, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka

Technical Paper

Long-term behavior of nonionic surfactant-added PDMS for self-driven microchips

Hojjat Madadi, Jasmina Casals-Terré

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