Ausgabe 2/2013
Inhalt (19 Artikel)
CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars
Tsung-Fu Yao, Sen-Yeu Yang
Metal-ceramic-composite casting of complex micro components
D. Buqezi-Ahmeti, J. Maisenbacher, J. Gibmeier, T. Hanemann
Improved micro fluxgate sensor with double-layer Fe-based amorphous core
Chong Lei, Jian Lei, Zhen Yang, Yong Zhou
In-plane spectroscopy of microfluidic systems made in photosensitive glass
Khalid Hasan Tantawi, William Gaillard, Jake Helton, Emanuel Waddell, Sergey Mirov, Vladimir Fedorov, John D. Williams
Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications
Abishek B. Kamaraj, Murali M. Sundaram, Ronnie Mathew
A novel high sensitive MEMS intraocular capacitive pressure sensor
Bahram Azizollah Ganji, M. Shahiri-Tabarestani
The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology
Chunhua Cai, Ming Qin
Silicon isotropic and anisotropic etching for MEMS applications
S. Negi, R. Bhandari
Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films
Junhong Li, Chenghao Wang, Jun Ma, Mengwei Liu
Analysis and design process of a bi-membrane structure for micro-flow regulators
Francisco Perdigones, Antonio Luque, Alfonso M. Gañán-Calvo, José M. Quero
A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction
Y. J. Du, J. F. Bao, J. W. Jiang
Light-actuated water droplet motions on ZnO nanorods
Chien-Wei Liu, Chen-Pin Hsu, J. Andrew Yeh, Yuh-Chang Sun, Yu-Fen Huang, Byung Hwan Chu, Fan Ren, Yu-Lin Wang
Silver (Ag) as a novel masking material in glass etching for microfluidics applications
Hing Wah Lee, Daniel C. S. Bien, Siti Aishah Mohamad Badaruddin, Aun Shih Teh
A micro gearing system based on a ratchet mechanism and electrostatic actuation
Phuc Hong Pham, Dzung Viet Dao
A MEMS-based pyramid micro-needle electrode for long-term EEG measurement
Long-Fei Wang, Jing-Quan Liu, Xiao-Xiao Yan, Bin Yang, Chun-Sheng Yang
A new inertial piezoelectric rotary actuator based on changing the normal pressure
Jianming Wen, Jijie Ma, Ping Zeng, Guangming Cheng, Zhonghua Zhang
Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications
Jia-dong Li, Jie Xie, Wei Xue, Dong-min Wu
Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperature
Yansheng Ma, Xiuying Chen, Bo Liu