Skip to main content
main-content

Zeitschrift

Microsystem Technologies

Microsystem Technologies 2/2013

Ausgabe 2/2013

Inhaltsverzeichnis ( 19 Artikel )

01.02.2013 | Technical Paper | Ausgabe 2/2013 Open Access

CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars

Tsung-Fu Yao, Sen-Yeu Yang

01.02.2013 | Technical Paper | Ausgabe 2/2013

Metal-ceramic-composite casting of complex micro components

D. Buqezi-Ahmeti, J. Maisenbacher, J. Gibmeier, T. Hanemann

01.02.2013 | Technical Paper | Ausgabe 2/2013

Improved micro fluxgate sensor with double-layer Fe-based amorphous core

Chong Lei, Jian Lei, Zhen Yang, Yong Zhou

01.02.2013 | Technical Paper | Ausgabe 2/2013

In-plane spectroscopy of microfluidic systems made in photosensitive glass

Khalid Hasan Tantawi, William Gaillard, Jake Helton, Emanuel Waddell, Sergey Mirov, Vladimir Fedorov, John D. Williams

01.02.2013 | Technical Paper | Ausgabe 2/2013

Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications

Abishek B. Kamaraj, Murali M. Sundaram, Ronnie Mathew

01.02.2013 | Technical Paper | Ausgabe 2/2013

A novel high sensitive MEMS intraocular capacitive pressure sensor

Bahram Azizollah Ganji, M. Shahiri-Tabarestani

01.02.2013 | Technical Paper | Ausgabe 2/2013

The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology

Chunhua Cai, Ming Qin

01.02.2013 | Technical Paper | Ausgabe 2/2013

Silicon isotropic and anisotropic etching for MEMS applications

S. Negi, R. Bhandari

01.02.2013 | Technical Paper | Ausgabe 2/2013

Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

Junhong Li, Chenghao Wang, Jun Ma, Mengwei Liu

01.02.2013 | Technical Paper | Ausgabe 2/2013

Electromagnetically force balanced polymer accelerometer

Ji Li, Werner K. Schomburg

01.02.2013 | Technical Paper | Ausgabe 2/2013

Analysis and design process of a bi-membrane structure for micro-flow regulators

Francisco Perdigones, Antonio Luque, Alfonso M. Gañán-Calvo, José M. Quero

01.02.2013 | Technical Paper | Ausgabe 2/2013

A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction

Y. J. Du, J. F. Bao, J. W. Jiang

01.02.2013 | Technical Paper | Ausgabe 2/2013

Light-actuated water droplet motions on ZnO nanorods

Chien-Wei Liu, Chen-Pin Hsu, J. Andrew Yeh, Yuh-Chang Sun, Yu-Fen Huang, Byung Hwan Chu, Fan Ren, Yu-Lin Wang

01.02.2013 | Technical Paper | Ausgabe 2/2013

Silver (Ag) as a novel masking material in glass etching for microfluidics applications

Hing Wah Lee, Daniel C. S. Bien, Siti Aishah Mohamad Badaruddin, Aun Shih Teh

01.02.2013 | Technical Paper | Ausgabe 2/2013

A micro gearing system based on a ratchet mechanism and electrostatic actuation

Phuc Hong Pham, Dzung Viet Dao

01.02.2013 | Technical Paper | Ausgabe 2/2013

A MEMS-based pyramid micro-needle electrode for long-term EEG measurement

Long-Fei Wang, Jing-Quan Liu, Xiao-Xiao Yan, Bin Yang, Chun-Sheng Yang

01.02.2013 | Technical Paper | Ausgabe 2/2013

A new inertial piezoelectric rotary actuator based on changing the normal pressure

Jianming Wen, Jijie Ma, Ping Zeng, Guangming Cheng, Zhonghua Zhang

01.02.2013 | Technical Paper | Ausgabe 2/2013

Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications

Jia-dong Li, Jie Xie, Wei Xue, Dong-min Wu

01.02.2013 | Technical Paper | Ausgabe 2/2013

Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperature

Yansheng Ma, Xiuying Chen, Bo Liu

Aktuelle Ausgaben