Ausgabe 2/2013
Inhalt (19 Artikel)
CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars
- Open Access
- Technical Paper
Tsung-Fu Yao, Sen-Yeu Yang
Metal-ceramic-composite casting of complex micro components
- Technical Paper
D. Buqezi-Ahmeti, J. Maisenbacher, J. Gibmeier, T. Hanemann
Improved micro fluxgate sensor with double-layer Fe-based amorphous core
- Technical Paper
Chong Lei, Jian Lei, Zhen Yang, Yong Zhou
In-plane spectroscopy of microfluidic systems made in photosensitive glass
- Technical Paper
Khalid Hasan Tantawi, William Gaillard, Jake Helton, Emanuel Waddell, Sergey Mirov, Vladimir Fedorov, John D. Williams
Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications
- Technical Paper
Abishek B. Kamaraj, Murali M. Sundaram, Ronnie Mathew
A novel high sensitive MEMS intraocular capacitive pressure sensor
- Technical Paper
Bahram Azizollah Ganji, M. Shahiri-Tabarestani
The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology
- Technical Paper
Chunhua Cai, Ming Qin
Silicon isotropic and anisotropic etching for MEMS applications
- Technical Paper
S. Negi, R. Bhandari
Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films
- Technical Paper
Junhong Li, Chenghao Wang, Jun Ma, Mengwei Liu
Analysis and design process of a bi-membrane structure for micro-flow regulators
- Technical Paper
Francisco Perdigones, Antonio Luque, Alfonso M. Gañán-Calvo, José M. Quero
A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction
- Technical Paper
Y. J. Du, J. F. Bao, J. W. Jiang
Light-actuated water droplet motions on ZnO nanorods
- Technical Paper
Chien-Wei Liu, Chen-Pin Hsu, J. Andrew Yeh, Yuh-Chang Sun, Yu-Fen Huang, Byung Hwan Chu, Fan Ren, Yu-Lin Wang
Silver (Ag) as a novel masking material in glass etching for microfluidics applications
- Technical Paper
Hing Wah Lee, Daniel C. S. Bien, Siti Aishah Mohamad Badaruddin, Aun Shih Teh
A micro gearing system based on a ratchet mechanism and electrostatic actuation
- Technical Paper
Phuc Hong Pham, Dzung Viet Dao
A MEMS-based pyramid micro-needle electrode for long-term EEG measurement
- Technical Paper
Long-Fei Wang, Jing-Quan Liu, Xiao-Xiao Yan, Bin Yang, Chun-Sheng Yang
A new inertial piezoelectric rotary actuator based on changing the normal pressure
- Technical Paper
Jianming Wen, Jijie Ma, Ping Zeng, Guangming Cheng, Zhonghua Zhang
Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications
- Technical Paper
Jia-dong Li, Jie Xie, Wei Xue, Dong-min Wu
Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperature
- Technical Paper
Yansheng Ma, Xiuying Chen, Bo Liu
