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1984 | OriginalPaper | Chapter
Molecular Dynamics Computer Simulation Study of the Damage Produced in Metal Target Surfaces During Ion Bombardment
Authors : D. E. Harrison Jr., W. A. Mason, R. P. Webb
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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Molecular dynamics simulations now study the damage created in metal surfaces by bombarding ions [1–5]. The computer model used in atom ejection studies [6] has been extended to cool and recrystallize the target. The target’s response is physically plausible, and its final configuration is consistent with transmission electron microscope (TEM) studies of ion-bombarded target surfaces. Here the chief emphasis will be placed on effects which influence the outcome of a SIMS experiment.