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Journal of Materials Science: Materials in Electronics

Published in:

17-10-2020

Morphology regulation of TiO₂ thin film by ALD growth temperature and its applications to encapsulation and light extraction

Authors: Xiaocong Lai, Yalian Weng, Guixiong Chen, Sihua Que, Xiongtu Zhou, Qun Yan, Chaoxing Wu, Tailiang Guo, Jie Sun, Yongai Zhang

Published in: Journal of Materials Science: Materials in Electronics | Issue 23/2020

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Abstract

As a multi-functional material, TiO₂ thin film has been widely studied and applied in display, photocatalysis, solar cells and other fields. In this work, TiO₂ thin films were prepared using atomic layer deposition, and their morphology was successfully regulated by the growth temperature. It was found that TiO₂ film prepared at low temperature was amorphous, uniform and dense, with great barrier property, which can be used for encapsulation. Crystalline TiO₂ nanoparticles with anatase phase appeared at higher temperature than 150 °C, whose amount increased with the growth temperature. The crystalline TiO₂ particles can be used as templates to prepare randomly textured nano-patterns, which were proved to be able to improve the light extraction efficiency of photoelectric devices. Specifically, the luminance efficiency of the QLED with the nano-patterns formed by the crystalline TiO₂ particle prepared at 200 °C and 250 °C were increased by 24.07% and 30.44%, respectively.

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Title: Morphology regulation of TiO2 thin film by ALD growth temperature and its applications to encapsulation and light extraction
Authors: Xiaocong Lai
Yalian Weng
Guixiong Chen
Sihua Que
Xiongtu Zhou
Qun Yan
Chaoxing Wu
Tailiang Guo
Jie Sun
Yongai Zhang
Publication date: 17-10-2020
Publisher: Springer US
Published in: Journal of Materials Science: Materials in Electronics / Issue 23/2020
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI: https://doi.org/10.1007/s10854-020-04643-6

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