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2013 | OriginalPaper | Chapter

4. Relationship Between Surface Morphology and Effective Medium Roughness

Authors : Angel Yanguas-Gil, Herbert Wormeester

Published in: Ellipsometry at the Nanoscale

Publisher: Springer Berlin Heidelberg

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Abstract

The modeling of surface and interface roughness is a key issue in the interpretation of ellipsometric measurements. Materials properties are often extracted from ellipsometry measurements in an indirect way by modeling the optical response of the material. Since roughness is known to affect the scattering of light on an interface, how roughness is incorporated into these models can affect the outcome of the fitting procedure.

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Appendix
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Metadata
Title
Relationship Between Surface Morphology and Effective Medium Roughness
Authors
Angel Yanguas-Gil
Herbert Wormeester
Copyright Year
2013
Publisher
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-33956-1_4