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Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Editorial

Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007

Authors: Chantal Khan Malek, Volker Saile, Bernd Michel

Published in: Microsystem Technologies | Issue 9-11/2008

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Excerpt

The series of workshops on high-aspect-ratio micro-structure technology (HARMST) is the premier international event devoted to the advancement of high-aspect-ratio manufacturing technologies and their applications. HARMST’07 is the 7th in this series of biennial specialized independent workshops that were launched in Karlsruhe, Germany in 1995 and held successively in Madison, WI, USA (1997), Kisarazu, Chiba, Japan (1999), Baden-Baden, Germany (2001), Monterey, CA, USA (2003), and Gyeongju, Korea (2005). The workshop was held for the first time in France and took place in Besançon. …
next article Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices

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Metadata
Title
Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
Authors
Chantal Khan Malek
Volker Saile
Bernd Michel
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0588-1

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