Issue 9-11/2008
Special issue on High Aspect Ratio Micro Structure Technology Workshop, Besançon, France, 7-9 June 2007
Content (86 Articles)
Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
Chantal Khan Malek, Volker Saile, Bernd Michel
Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices
Kuo-Yung Hung, Te-Hsien Liang
Fabricating HARMS by using megasonic assisted electroforming
Gang Liu, Xinlong Huang, Ying Xiong, Yangchao Tian
Statistical process and measurement control for micro production
G. Lanza, J. Fleischer, M. Schlipf
High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
Ren Yang, Chuck Mullen, Mark Schaline, Karl Reithmaier, Ron Sheets
Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol
Jun Wang, Gang Liu, Ying Xiong, Xinlong Huang, Yuhua Guo, Yangchao Tian
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen, Chunlei Kang, Xinlong Huang, Yangchao Tian
Applications of thick Sacrificial-Layer of zinc in LIGA process
XinLong Huang, Gang Liu, Xiong Ying, Jun Wang, Yuhua Guo, Chunlei Kang, Yangchao Tian
Fast patterning microstructures using inkjet printing conformal masks
C.-H. Lin, H. Yang, F.-Y. Chang, S.-H. Chang, M.-T. Yen
On the simulation of molded micro components and systems
Albert Albers, Hans-Georg Enkler, Pablo Leslabay
The anomalous behavior and properties of Ni–Co films codeposited in the sulfamate-chloride electrolyte
C. K. Chung, R. X. Zhou, W. T. Chang
Microlens array fabrication by backside exposure using Fraunhofer diffraction
In-Hyouk Song, Kyung-Nam Kang, Yoonyoung Jin, Daniel S.-W. Park, Pratul K. Ajmera
Reflectivity test of X-ray mirrors for deep X-ray lithography
V. Nazmov, E. Reznikova, A. Last, M. Boerner, J. Mohr
Fabrication of micro sloping structures of SU-8 by substrate penetration lithography
J. Onishi, K. Makabe, Y. Matsumoto
Fabrication of large area diffraction grating using LIGA process
Daiji Noda, Makoto Tanaka, Kazuma Shimada, Wataru Yashiro, Atsushi Momose, Tadashi Hattori
Effect of baffle height and Reynolds number on fluid mixing
C. K. Chung, C.-Y. Wu, T. R. Shih
Effect of applying ultrasonic vibration in thermal nanoimprint lithography
Harutaka Mekaru, Toshihiko Noguchi, Hiroshi Goto, Masaharu Takahashi
A Si stencil mask for deep X-ray lithography fabricated by MEMS technology
Harutaka Mekaru, Takayuki Takano, Yoshiaki Ukita, Yuichi Utsumi, Masaharu Takahashi
Proton beam writing: a platform technology for nanowire production
J. A. van Kan, F. Zhang, S. Y. Chiam, T. Osipowicz, A. A. Bettiol, F. Watt
High-aspect-ratio through-hole array microfabricated in a PMMA plate for monodisperse emulsion production
Isao Kobayashi, Sayumi Hirose, Takanori Katoh, Yanping Zhang, Kunihiko Uemura, Mitsutoshi Nakajima
Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology
Takayuki Shibata, Yoichi Takahashi, Takahiro Kawashima, Toshio Kubota, Mamoru Mita, Takashi Mineta, Eiji Makino
Process parameter analysis in ablating micro-mold manufacturing
J. Fleischer, G. Halvadjiysky, S. Haupt
Cylindrical coils created with 3D X-ray lithography and metallization
Yoshifumi Matsumoto, Masaru Setomoto, Daiji Noda, Tadashi Hattori
Resin micromachining by roller hot embossing
Naoya Ishizawa, Kazuyoshi Idei, Taro Kimura, Daiji Noda, Tadashi Hattori
Effect of cobalt content on the work function of the electrodeposited nickel–cobalt films
C. K. Chung, W. T. Chang, R. X. Zhou
Fabrication of the cyclical fluid channel using the surface acoustic wave actuator and continuous fluid pumping in the cyclical fluid channel
Daisuke Fukuoka, Y. Utsumi
High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structure
Yuichi Utsumi, Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro
Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing
Xuechuan Shan, H. P. Maw, R. T. Tjeung, S. H. Ling, C. W. Lu, R. Jachowicz
High efficiency mixing by the use of cross-linked micro capillary fluid filter
K. Fujiwara, Y. Ukita, M. Takeo, S. Negoro, T. Kanie, M. Katayama, Y. Utsumi
Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching
Mitsuyoshi Kishihara, Yoshiaki Ukita, Yuichi Utsumi, Isao Ohta
Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography
M. Chatzichristidi, I. Rajta, Th. Speliotis, E. Valamontes, D. Goustouridis, P. Argitis, I. Raptis
Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
Daniel Sang-Won Park, Youngkyun Jeong, Jeong-Bong Lee, Sungyong Jung
Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference
Hyung Sub Sim, Seong Hyuk Lee, Kwan Gu Kang
A new UV sensitive positive resist for X-ray masks manufacture
Anja Voigt, Marina Heinrich, Gabi Gruetzner, Josef Kouba, H.-U. Scheunemann, I. Rudolph
High functionality of a polymer nanocomposite material for MEMS applications
Fareed Dawan, Yoonyoung Jin, Jost Goettert, Samuel Ibekwe
Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis
Yuichi Utsumi, Tomohiro Ikeda, Megumi Minamitani, Kazuo Suwa
Enhancement of the adhesive force of metal films on PTFE surface achieved by fast-atom-beam surface modification
Yuichi Utsumi, Takefumi Kishimoto
Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
N. Baron, J. Passave, B. Guichardaz, G. Cabodevila
Validation of micromechanical systems
Albert Albers, Norbert Burkardt, Tobias Deigendesch, Claudia Ellmer, Stefan Hauser
Why you will use the deep X-ray LIG(A) technology to produce MEMS?
Pascal Meyer, Joachim Schulz, Lothar Hahn, Volker Saile
Using bulk micromachined structures to enhance pool boiling heat transfer
Min Zhang, Kun Lian
Micro injection molding for mass production using LIGA mold inserts
Takanori Katoh, Ryuichi Tokuno, Yanping Zhang, Masahiro Abe, Katsumi Akita, Masaharu Akamatsu
Stress engineering and mechanical properties of SU-8-layers for mechanical applications
J. Hammacher, A. Fuelle, J. Flaemig, J. Saupe, B. Loechel, J. Grimm
Manufacturing of microstructures with high aspect ratio by micromachining
T. Gietzelt, L. Eichhorn, K. Schubert
Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications
M. Haj-Taieb, A. S. M. A. Haseeb, J. Caulfield, K. Bade, J. Aktaa, K. J. Hemker
Ni electroplating on a resist micro-machined by proton beam writing
Naoyuki Uchiya, Yusuke Furuta, Hiroyuki Nishikawa, Tohru Watanabe, Junji Haga, Takahiro Satoh, Masakazu Oikawa, Yasuyuki Ishii, Tomihiro Kamiya
High aspect ratio glass structures produced by means of the drawing technology
A. Hesse, S. Mrotzek, D. Hülsenberg, E. Rädlein
Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing
M. Sahli, C. Roques-Carmes, C. Khan Malek, J. C. Gelin
Control of the quality of laser surface texturing
Christophe Vincent, Guy Monteil, Thierry Barriere, Jean Claude Gelin
Development of lighting panel comprising light tube fabricated by LIGA process
Yoshitaka Sawa, Takanori Tanaka, Takeshi Kitadani, Hiroshi Ueno, Koichi Itoigawa, Kenji Yamashita, Daiji Noda, Tadashi Hattori
Polytetrafluoroethylene processing characteristics using high-energy X-ray
Yoshiaki Ukita, Kazuhiro Kanda, Shinji Matsui, Mitsuyoshi Kishihara, Yuichi Utsumi
Enzyme-linked immunosorvent assay using vertical microreactor stack with microbeads
Yoshiaki Ukita, Toshifumi Asano, Kuniyo Fujiwara, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro, Yuichi Utsumi
Experimental characterization of transcription properties of microchannel geometry fabricated by injection molding based on Taguchi method
Dong Sung Kim, Jong Sun Kim, Young Bae Ko, Jong Deok Kim, Kyung Hwan Yoon, Chul Jin Hwang
Fabrication and test of multilayer microcoils with a high packaging density
C. Ruffert, H. H. Gatzen
Study on demolding temperature in thermal imprint lithography via finite element analysis
Zhichao Song, Byoung Hee You, Jaejong Lee, Sunggook Park
Replication technologies for HARM devices: status and perspectives
V. Piotter, W. Bauer, T. Hanemann, M. Heckele, C. Müller
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
Rainer Engelke, Josef Mathuni, Gisela Ahrens, Gabi Gruetzner, Martin Bednarzik, Daniel Schondelmaier, Bernd Loechel
Fabrication of antiscatter grids and collimators for X-ray and gamma-ray imaging by lithography and electroforming
Olga V. Makarova, Guohua Yang, Platte T. Amstutz, Cha-Mei Tang
De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem
Karthik S. Colinjivadi, Yonghao Cui, Matthew Ellis, George Skidmore, Jeong-Bong Lee
Viable cell handling with high aspect ratio polymer chopstick gripper mounted on a nano precision manipulator
Karthik S. Colinjivadi, Jeong-Bong Lee, Rockford Draper
Application of micro structured photosensitive glass for the gravure printing process
U. Brokmann, K. Sönnichsen, D. Hülsenberg
Shape controllable micro-nozzle fabrication
KyungNam Kang, Yoonyoung Jin, Jost Goettert, Pratul K. Ajmera
Microcasting of Al bronze: influence of casting parameters on the microstructure and the mechanical properties
Gundi Baumeister, Brando Okolo, Joachim Rögner
Fabrication and performance of 2-D compound X-ray refractive lenses
Suk-Sang Chang, Jin-Pyoung Lee, Guk-Bae Kim, Sang-Joon Lee, Jong-Hyun Kim
Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds
Guohua Yang, Olga V. Makarova, Platte Amstutz, Cha-Mei Tang
Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates
J. Prokop, G. Finnah, J. Lorenz, V. Piotter, R. Ruprecht, J. Hausselt
Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears
Bernd Loechel, Jost Goettert, Gabi Gruetzner, Martin Bednarzik, Christoph Waberski, Gisela Ahrens, Rainer Engelke, Varshni Singh, Reinhard Degen, Udo Kirsch
Soft X-ray lithography of high aspect ratio SU8 submicron structures
Elena Reznikova, Juergen Mohr, Martin Boerner, Vladimir Nazmov, Peter-Juergen Jakobs
Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide
Jang Min Park, Nam Hyo Kim, Bong-Kee Lee, Kun-Hong Lee, Tai Hun Kwon
3-D PTFE microstructure fabricated using synchrotoron radiation etching
Mitsuhiro Horade, Sommawan Khumpuang, Susumu Sugiyama
Polyether ether ketone microstructures for chemical analytics
W. Hwang, H. Mühlberger, W. Hoffmann, A. E. Guber, V. Saile
Sidewall slopes and roughness of SU-8 HARMST
K. D. Vora, B.-Y. Shew, B. Lochel, E. C. Harvey, J. P. Hayes, A. G. Peele
Stiction issues and actuation of RF LIGA-MEMS variable capacitors
Darcy T. Haluzan, David M. Klymyshyn, Martin Börner, Sven Achenbach, Garth Wells, Timo Mappes, Jürgen Mohr
Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off
Sven Achenbach, David Klymyshyn, Timo Mappes, Anton Kachayev, Venkat Subramanian, Garth Wells, Jürgen Mohr
Submicron polymer structures with X-ray lithography and hot embossing
Timo Mappes, Matthias Worgull, Mathias Heckele, Jürgen Mohr
Measurement of side walls of high aspect ratio microstructures
M. Simon, E. Reznikova, V. Nazmov, A. Last
Microscale molding replication of Cu- and Ni-based structures
J. Jiang, Fanghua Mei, W. J. Meng, E. Lara-Curzio
Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography
Bong-Kee Lee, Tai Hun Kwon
Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Wen Dai, Wanjun Wang
Design and fabrication of an electrochemically actuated microvalve
Dong Eun Lee, Steve Soper, Wanjun Wang
High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming
G. Tosello, G. Bissacco, P. T. Tang, H. N. Hansen, P. C. Nielsen
Mixer slit plates fabricated by direct-LIGA
Martin Bednarzik, Christoph Waberski, Ivo Rudolph, Bernd Löchel, Frank Herbstritt, Gisela Ahrens
Design and manufacturing of micro milling tools
J. Fleischer, M. Deuchert, C. Ruhs, C. Kühlewein, G. Halvadjiysky, C. Schmidt
Sidewall slopes and roughness of SU-8 HARMST
K. D. Vora, B.-Y. Shew, B. Lochel, E. C. Harvey, J. P. Hayes, A. G. Peele