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Microsystem Technologies

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01-10-2008 | Technical Paper

Applications of thick Sacrificial-Layer of zinc in LIGA process

Authors: XinLong Huang, Gang Liu, Xiong Ying, Jun Wang, Yuhua Guo, Chunlei Kang, Yangchao Tian

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

Sacrificial-Layer technology is widely used in the microfabrication field of SLIGA. In this paper, thick sacrificial layers of zinc techniques are studied. A movable structure with aspect ratio of 25 has been fabricated by using zinc sacrificial layer through LIGA technique. Compared with conventional metal sacrificial layers of titanium or copper, the thickness of zinc layer can grow up to more than 10 μm. The adhesion of different seed layers and the physiognomy of sacrificial layer are also focused in this paper.

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Title: Applications of thick Sacrificial-Layer of zinc in LIGA process
Authors: XinLong Huang
Gang Liu
Xiong Ying
Jun Wang
Yuhua Guo
Chunlei Kang
Yangchao Tian
Publication date: 01-10-2008
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-007-0543-6

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