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Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

High aspect ratio glass structures produced by means of the drawing technology

Authors: A. Hesse, S. Mrotzek, D. Hülsenberg, E. Rädlein

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

In this work the production of microstructured glasses by means of the drawing technology is presented. The technology and the influence of the process parameters are described. Examples of drawn structures are shown and applications are pointed out.
previous article Ni electroplating on a resist micro-machined by proton beam writing
next article Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing

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Literature
Belau S, Hülsenberg D, Mrotzek S, Harnisch A (2004) Fabrication of microstructured glass components by drawing technology. Actuator
Harnisch A (1998) Beitrag zur Entwicklung von Herstellungstechnologien für komplexe Bauteile aus mikrostrukturiertem Glas, Shaker
Hesse A, Mrotzek S, Belau S, Hülsenberg D (2005) Deutsche Glastechnische Gesellschaft, pp 41–42
Metadata
Title
High aspect ratio glass structures produced by means of the drawing technology
Authors
A. Hesse
S. Mrotzek
D. Hülsenberg
E. Rädlein
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0562-y

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