Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming

Authors: G. Tosello, G. Bissacco, P. T. Tang, H. N. Hansen, P. C. Nielsen

Published in: Microsystem Technologies | Issue 9-11/2008

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (μEDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
previous article Design and fabrication of an electrochemically actuated microvalve
next article Mixer slit plates fabricated by direct-LIGA

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Azcarate S, Uriarte L, Bigot S, Bolt P, Staemmler L, Tosello G, Roth S, Schoth A (2006) Hybrid tooling: a review of process chain for tooling microfabrication within 4M. In: Proceedings of the 2nd international conference on multi material micro manufacture (4M), Grenoble (France), pp 305–308, ISBN-13:978-0-08-045263-9
Bissacco G, Hansen HN, Wiwe BD (2007a) Micro EDM milling for silicon based tooling. In: Proceedings of the 9th international conference on management of innovative technologies, Fiesa (Slovenia), pp 126–130
Bissacco G, Valentincic J, Wiwe BD, Hansen HN (2007b) Characterization of pulses in micro EDM milling based on wear and material removal. In: Proceedings of the 3rd international conference on multi material micro manufacture (4M), Borovets, Bulgaria, pp 297–300, ISBN 978-1904445-53-1
Blattert C, Jurischka R, Tahhan I, Schoth A, Kerth P, Menz W (2005) Microfluidic blood/plasma separation unit based on microchannel bend structures. In: Proceedings of the 3rd IEEE/EMBS special topic conference on microtechnology in medicine and biology, Kahuku, Oahu (USA), pp 38–41, ISBN 0780387112
Feng-Tsai W, Chen-Siang H, Wen-Feng L (2006) Fabrication of micro components to Silicon wafer using EDM process. Materials Science Forum, Progress on Advanced Manufacture for Micro/Nano Technology. Trans Tech Publ Switz 505–507:217–222
Tang PT (2006) A method of manufacturing a mould part, WO2006026989 (A1), US2007298173 (A1), EP1807553 (A0)
Plummer JD, Deal MD, Griffin PB (2000) Silicon VLSI technology. Prentice Hall, Upper Saddle River, ISBN 0-13-085037-3
Tang PT, Fugl J, Uriarte L, Bissacco G, Hansen HN (2006) Indirect tooling based on micromilling, electroforming and selective etching. In: Proceedings of the 2nd international conference on multi material micro manufacture (4M), Grenoble (France), pp 183–186, ISBN-13:978-0-08-045263-9
Uhlmann E, Piltz S, Doll U (2005) Machining of micro/miniature dies and moulds by electrical discharge machining-Recent development. J Mater Process Technol 167:488–493 Issue 2–3 ISSN 09240136CrossRef
Metadata
Title
High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming
Authors
G. Tosello
G. Bissacco
P. T. Tang
H. N. Hansen
P. C. Nielsen
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0564-9

Other articles of this Issue 9-11/2008

Microsystem Technologies 9-11/2008 Go to the issue

Technical Paper

Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates

Technical Paper

Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications

Technical Paper

Effect of cobalt content on the work function of the electrodeposited nickel–cobalt films

Technical Paper

Commercialising HARMST-LIGA technologies

Technical Paper

Submicron polymer structures with X-ray lithography and hot embossing

Technical Paper

Cylindrical coils created with 3D X-ray lithography and metallization