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Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates

Authors: J. Prokop, G. Finnah, J. Lorenz, V. Piotter, R. Ruprecht, J. Hausselt

Published in: Microsystem Technologies | Issue 9-11/2008

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Excerpt

Market research of manufacturing processes for mass production of micro parts shows that plastic parts can be produced effectively with very high surface qualities using injection moulding. At present, mass production of metal and ceramic parts produced by metal or ceramic injection moulding is possible, but the surface and structural quality of these parts is weak compared to injected plastic parts. Several processes that render high quality metallic parts like micro machine cutting, direct lithographic processes, or laser ablation are very expensive and can only be used to produce small numbers or high cost products. …
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Literature
Finnah G, Naumann K, Holstein N, Piotter V, Ruprecht R, Hausselt J (2004) Herstellung von metallischen Mikrokomponenten durch Einlegespritzgießen und anschließende Galvanoformung. Galvanotechnik 95:S2776–S2780
Piotter V, Holstein N, Ruprecht R, Schanz G (2003a) Electroforming of metallic microparts via two-component injection molding of sacrificial templates MICRO SYSTEM technologies 2003. In: International conference and exhibition on micro electro, opto, mechanical systems and components, München
Piotter V, Holstein N, Oskotski E, Schanz G, Ruprecht R, Hausselt J (2003b) Metal micro parts made by electroforming on two-component lost polymer moulds. In: Proceedings of 3rd Euspen international conference, Eindhoven, pp 367–370
Metadata
Title
Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates
Authors
J. Prokop
G. Finnah
J. Lorenz
V. Piotter
R. Ruprecht
J. Hausselt
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0570-y

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