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Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

Authors: Bernd Loechel, Jost Goettert, Gabi Gruetzner, Martin Bednarzik, Christoph Waberski, Gisela Ahrens, Rainer Engelke, Varshni Singh, Reinhard Degen, Udo Kirsch

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price.
previous article Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates
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Footnotes
Literature
Goettert J, Ahrens G, Bednarzik M, Degen R, Desta Y, Gruetzner G, Jian L, Loechel B, Ruhmann R, Yoonyoung J (2002) Cost Effective Fabrication of High Precision Microstructures Using a Direct-LIGA Approach. In: Proceedings of COMS 2002, Ypsilanti, Michigan, September
Kouba J, Bednarzik M, Engelke R, Ahrens G, Miller H, Haase D (2006) Optimizing SU-8 Resist to Fabricate Micro-Metallic Structures. Solid State Technol. April 39–44
Loechel B, Goettert J, Desta YM (2007) Direct LIGA service for prototyping: status report. Microsyst Technol 13:327–334CrossRef
Metadata
Title
Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears
Authors
Bernd Loechel
Jost Goettert
Gabi Gruetzner
Martin Bednarzik
Christoph Waberski
Gisela Ahrens
Rainer Engelke
Varshni Singh
Reinhard Degen
Udo Kirsch
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0607-2

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