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Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds

Authors: Guohua Yang, Olga V. Makarova, Platte Amstutz, Cha-Mei Tang

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

A microfabrication process allowing rapid replication of high aspect ratio powder composite microstructures is developed using silicone rubber casting. Potential applications include the elimination lead in medical imaging instruments, such as anti-scatter grids for X-ray imaging and collimators for nuclear imaging. In this paper, we demonstrated the high precision fabrication of grids and collimators using high density tungsten powder composite of about 9–9.5 g/cm3 or greater. Aspect ratio of 15:1 was demonstrated for a single piece and larger aspect ratio was achieved by precision stacking of many layers. The demonstrated replication process provides low cost, mass production of high-aspect-ratio microstructures.
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Literature
Bauer W, Knitter R (2002) Development of a rapid prototyping process chain for the production of ceramic microcomponents. J Mater Sci 37:3127–3140CrossRef
Madou MJ (2002) Fundamentals of microfabrication: the science of miniaturization, CRC Press, Boca Raton
Makarova OV, Mancini DC, Moldovan N, Divan R, Tang C-M, Ryding DG, Lee RH (2003) Microfabrication of freestanding metal structures using graphite substrate. Sens Actuators A 103:182–186CrossRef
Makarova OV, Mancini DC, Moldovan N, Divan R, Zyryanov VN, Tang C-M (2004) Fabrication of focused two-dimensional grids. Microsyst Technol 10:540–543CrossRef
Yan Y, Chan-Park MB, Gao J, Yue CY (2004) Electroless nickelplated UV-embossed microstructured surface with very high aspect ratio channels. Langmuir 20:1031–1035CrossRef
Zhang D, Su B, Button TW (2004) Preparation of concentrated aqueous alumina suspensions for softmolding microfabrication. J Euro Cera Soc 24:231–237MATHCrossRef
Metadata
Title
Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds
Authors
Guohua Yang
Olga V. Makarova
Platte Amstutz
Cha-Mei Tang
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0575-6

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