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Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

High efficiency mixing by the use of cross-linked micro capillary fluid filter

Authors: K. Fujiwara, Y. Ukita, M. Takeo, S. Negoro, T. Kanie, M. Katayama, Y. Utsumi

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

A novel type passive mixing device that causes the three-dimensional flow was proposed. This mixer consists of the integrated capillary bundle structure. And the capillaries ware cross-linked each other. So it is called cross-linked micro capillary filter. The mixing effect of the cross-linked micro capillary filter was calculated by the computational fluid dynamics (CFD). The fluid behaviour in the fine three-dimensional structure could be analysed by the use of CFD. In the result of CFD calculation, the cross-linked micro capillary filter estimated high mixing effect. Moreover, the mixing efficiency was become higher by change the cross-linked form. The calculation result was decided the form of the cross-linked micro capillary filter. And this filter was fabricated by application of the Deep X-ray lithography. To form the cross-linked capillary, it was operated twice exposures. In these exposures, respectively the exposure stage was tilted to difference angle. The cross-linked capillary filter fabricated in this way was applied to vertical fluid flow operation. This cross-linked capillary filter could hold and transmit the fluid by the switchover of in impressed pressure. Herewith the cross-linked micro capillary filter showed availability as high efficiency mixing device.

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Metadata
Title
High efficiency mixing by the use of cross-linked micro capillary fluid filter
Authors
K. Fujiwara
Y. Ukita
M. Takeo
S. Negoro
T. Kanie
M. Katayama
Y. Utsumi
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0582-7

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