Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching

Authors: Mitsuyoshi Kishihara, Yoshiaki Ukita, Yuichi Utsumi, Isao Ohta

Published in: Microsystem Technologies | Issue 9-11/2008

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

PTFE is widely used as a microwave and millimeter-wave material. However, it is known that PTFE is a difficult material to cut at high precision by conventional machining, or even by laser cutting or electrical discharge machining. It has been reported that PTFE microstructures can be fabricated by direct exposure to synchrotron radiation. A metallic waveguide is one of effective media guiding a millimeter- and submillimeter-wave because of the advantage of low loss. In this paper, the SR direct etching of PTFE is introduced and a trial fabrication of millimeter-wave PTFE waveguide is attempted.
previous article High efficiency mixing by the use of cross-linked micro capillary fluid filter
next article Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Digby JW, McIntosh CE, Parkhurst GM, Towlson BM, Hadjiloucas S, Bowen JW, Chamberlain JM, Pollard RD, Miles RE, Steenson DP, Karatzas LS, Cronin NJ, Davies SR (2000) Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies. IEEE Trans Microw Theory Tech 48:1293–1302CrossRef
Forman MA (2006) Low-loss LIGA-fabricated coplanar waveguide and filter. Proc APMC2006 4:1905–1907
Kishihara M, Kawai T, Kokubo Y, Ohta I (1999) A novel 180-degree 3dB hybrid using a cylindrical cavity. IEICE Trans Electron E82-C:1148–1153
Toda K, Ohta I, Kishihara M (2006) H-Plane crossed-waveguide hybrids. In: 36th European Microwave Conf. Proc, pp 987–990
Ukita Y, Kanda K, Matsui S, Utsumi Y (2006) Fabrication of PTFE microstructure using synchrotron radiation direct etching for microfluidics application. In: Proc. of EIPBN2006, pp 509–510
Zhang Y, Katoh T, Washio M, Yamada H, Hamada S (1995) High aspect ratio micromachining Teflon by direct exposure to synchrotron radiation. Appl Phys Lett 67:872–874CrossRef
Metadata
Title
Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching
Authors
Mitsuyoshi Kishihara
Yoshiaki Ukita
Yuichi Utsumi
Isao Ohta
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0586-3

Other articles of this Issue 9-11/2008

Microsystem Technologies 9-11/2008 Go to the issue

Technical Paper

Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique

Technical Paper

Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique

Technical Paper

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

Technical Paper

Sidewall slopes and roughness of SU-8 HARMST

Technical Paper

Design and manufacturing of micro milling tools

Technical Paper

On the simulation of molded micro components and systems