Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 9-11/2008

01-10-2008 | Technical Paper

Validation of micromechanical systems

Authors: Albert Albers, Norbert Burkardt, Tobias Deigendesch, Claudia Ellmer, Stefan Hauser

Published in: Microsystem Technologies | Issue 9-11/2008

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

For a reliable function of micro-mechanical systems the behavior of the used gear wheels is of extreme importance. But up to now there is no general available method for quality assurance of them. In this paper an adoption of the tangential and radial composite inspection as defined in standards for macroscopic gear wheels to the special needs and boundary conditions in micro technology is proposed. It is based on an examination of the differing results if the same gear wheels are mated with varying angles of rotation. Additionally special test rigs are presented which are able to test micro gear wheels. Finally some exemplary results are shown.
previous article Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
next article Commercialising HARMST-LIGA technologies

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Albers A, Burkardt N, Hauser S (2007) Inspection of micro gear wheels with a modified tangential composite inspection. In: 10th CIRP conference on computer aided tolerancing, 21–23 March, Erlangen, Germany
Normenausschuss Feinmechanik und Optik (NaFuO) im DIN Deutsches Institut für Normung e.V (1972a) DIN 58405: Stirnradgetriebe der Feinwerktechnik. Beuth Verlag, Berlin
Normenausschuss Feinmechanik und Optik (NaFuO) im DIN Deutsches Institut für Normung e.V (1972b) DIN 58420: Lehrzahnräder zum Prüfen von Stirnrädern der Feinwerktechnik. Beuth Verlag, Berlin
Normenausschuss Antriebstechnik (NAN) im DIN Deutsches Institut für Normung e.V (1987) “DIN 3960: Begriffe und Bestimmungsgrößen für Stirnräder (Zylinderräder) und Stirnradpaare (Zylinderradpaare) mit Evolventenverzahnung”. Beuth Verlag, Berlin
VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik (GMA) (2001) “VDI/VDE 2608: Einflanken- und Zweiflanken-Wälzprüfung an Zylinderrädern. Kegelrädern, Schnecken und Schneckenrädern”/“Tangential composite and radial composite inspection of cylindrical gears, bevel gears, worms and worm wheels”. Beuth Verlag, Berlin
Metadata
Title
Validation of micromechanical systems
Authors
Albert Albers
Norbert Burkardt
Tobias Deigendesch
Claudia Ellmer
Stefan Hauser
Publication date
01-10-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0601-8

Other articles of this Issue 9-11/2008

Microsystem Technologies 9-11/2008 Go to the issue

Technical Paper

Proton beam writing: a platform technology for nanowire production

Technical Paper

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

Technical Paper

Measurement of side walls of high aspect ratio microstructures

Technical Paper

Statistical process and measurement control for micro production

Technical Paper

Using bulk micromachined structures to enhance pool boiling heat transfer

Technical Paper

Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference