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Microsystem Technologies

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01-10-2008 | Technical Paper

Stiction issues and actuation of RF LIGA-MEMS variable capacitors

Authors: Darcy T. Haluzan, David M. Klymyshyn, Martin Börner, Sven Achenbach, Garth Wells, Timo Mappes, Jürgen Mohr

Published in: Microsystem Technologies | Issue 9-11/2008

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Abstract

High aspect ratio variable capacitors have been fabricated using deep X-ray lithography and electroplating. Stiction phenomena applicable to high aspect ratio devices are presented, including the conditions for stiction to occur and the critical dimensions of structures. Actuation tests at 3 GHz are also presented and show a maximum capacitance of 0.86 pF with no actuation voltage and a minimum capacitance of 0.70 pF with an actuation voltage of 20 V just before pull-in, which gives a tuning range of 1.23:1. Corresponding Q-factor values are 49.3 and 70.8 respectively. After pull-in, the measured capacitance is 0.61 pF, corresponding to a tuning range of 1.41:1, with a maximum Q-factor of 102.9.

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Achenbach S, Klymyshyn D, Haluzan D, Mappes T, Wells G, Mohr J (2006) Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating. Microsyst Technol 13(3–4):343–347CrossRef

Adamson AW, Gast AP (1997) Physical chemistry of surfaces, 6th edn. Wiley, New York

Bain CD, Troughton EB, Tao YT, Evall J, Whitesides GM, Nuzzo RG (1989) Formation of monolayer films by the spontaneous assembly of organic thiols from solution onto gold. J Am Chem Soc 111:321–335CrossRef

Becker EW, Ehrfeld W, Hagmann P, Maner A, Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectr Eng 4(1):36–56

Chibowski E, Ontiveros-Ortega A, Perea-Carpio R (2002) On the interpretation of contact angle hysteresis. J Adh Sci Technol 16:1367–1404CrossRef

Ishiyama C, Higo Y (2002) Effects of humidity on Young’s modulus in poly(methyl methacrylate). J Polym Sci Pol Phys 40:460–465CrossRef

Israelachvili JN (1985) Intermolecular and surface forces. Academic Press, New York

Kim BH, Chung TD, Oh CH, Chun K (2001) A new organic modifier for anti-stiction. J Microelectromech Sys 10:33–40CrossRef

Mastrangelo CH (1997) Adhesion-related failure mechanisms in micromechanical devices. Tribol Lett 3:223–238CrossRef

Mastrangelo CH (2000) Suppression of stiction in MEMS. Mat Res Soc Symp Proc 605:105–116

Mekhalif Z, Riga J, Pireaux JJ, Delhalle J (1997) Self-assembled monolayers of n-dodecanethiol on electrochemically modified polycrystalline nickel surfaces. Langmuir 13:2285–2290CrossRef

Rebeiz GM (2003) RF MEMS theory, design, and technology. Wiley, Hoboken

Scheepers PR, Voorthuyzen JA, Olthuis W, Bergveld P (1992) Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate. Sens Actuator 30:231–239CrossRef

Stephens LS, Kelly KW, Simhadri S, McCandless AB, Meletis EI (2001) Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts. J Microelectromech Sys 10:347–359CrossRef

Tas N, Sonnenberg T, Jansen H, Legtenberg R, Elwenspoek M (1996) Stiction in surface micromachining. J Micromech Microeng 6:385–397CrossRef

Tyson WR Miller WA (1977) Surface free energies of solid metals: estimation from liquid surface tension measurements. Surf Sci 62:267–276CrossRef

Zhao YP, Wang LS, Yu TX (2003) Mechanics of adhesion in MEMS—a review. J Adh Sci Technol 17:519–546CrossRef

Title: Stiction issues and actuation of RF LIGA-MEMS variable capacitors
Authors: Darcy T. Haluzan
David M. Klymyshyn
Martin Börner
Sven Achenbach
Garth Wells
Timo Mappes
Jürgen Mohr
Publication date: 01-10-2008
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 9-11/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-008-0583-6

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