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Microsystem Technologies

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01-08-2006 | Technical Paper

Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method

Authors: C. Wochnowski, S. Metev, F. Vollertsen

Published in: Microsystem Technologies | Issue 9/2006

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Abstract

Surface relief gratings are written into the surface of a planar PMMA substrate by the UV-excimer laser based phase mask method. The surface relief grating topography (grating amplitude and grating constant) is investigated in dependence on the laser irradiation parameters (fluence and irradiation dose) yielding some information relevant for the ablation and grating formation mechanism.

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Braun R, Hess P (Nov 1993) Time-of-flight investigation of infrared laser-induced multilayer desorption of benzene. J Chem Phys 99(10):8330–8340CrossRef

Brück R, Rizvi N, Schmidt A (2003) Angewandte Mikrotechnik. Carl Hanser Verlag, Munchen

Domen K, Chuang TJ (1989) Laser induced photodissociation and desorption.I + II. C₂H₂ absorbed on Al₂O₃. J Chem Phys 90(6):3318–3338CrossRef

Duley WW (1996) UV-Lasers—effects & applications in materials science. Cambridge University Press, Cambridge

Dyer PE (1997) Laser ablation: processes and applications. In: Proceedings of SPIE, XI internatioanl symposium gas flow and chemical lasers and high-power lasers, vol 3092, pp 412–417

Dyer PE (2003) Excimer laser polymer ablation: twenty years on. Appl Phys A 77:167–173CrossRefMathSciNet

Dyer PE, Farley RJ, Giedl R (1994) Study and analysis of submicron-period grating formation on polymers ablated using a KrF laser irradiated phase mask. Appl Phys Lett 64(25):3389–3391CrossRef

Dyer PE, Farley RJ, Giedl R (1995) Analysis of grating formation with excimer laser irradiated phase masks. Opt Commun 115:327–334CrossRef

Dyer PE, Farley RJ, Giedl R, Karnakis DM (1996) Excimer laser ablation of polymers and glasses for grating fabrication. Appl Surf Sci 96–98:537–549CrossRef

Ehrfeld W (2002) Mikrotechnik. Hansa-Verlag, Carl Hanser Verlag, Munchen

Falldorf C, Wochnowski C, Meteva K, von Kopylow C, Metev S, Jüptner W (2005) Technisches Messen (in press)

Fozza AC, Roch J, Klemberg-Sapieha JE, Kruse A, Holländer A, Wertheimer MR (1997) Oxidation and ablation of polymers by vacuum–UV radiation from low pressure plasmas. Nucl Instr Meth Phys Res B 131:205–210CrossRef

Gillett D, Basting D (1998) Excimer lasers fashion superior fibre gratings. FibreSystems 2(10):19–22

Hess P (1993) New insights into laser-induced polymer ablation. Highlights LambdaPhysik 42:1–3MathSciNet

Holzer P, Bachmann F (1989) Kunststoffe 79(6):485–490

Juma S (1996) Fibre gratings reinforce the bandwidth explosion. OptoLaser Eur 34:25–27

Kashyap R (1999) Fiber Bragg gratings. Academic, San Diego

Küper S, Brannon J, Brannon K (1993) Threshold behaviour in polyimide photoablation: single-shot rate measurements and surface-temperature modeling. Appl Phys A 56:43–50CrossRef

Ma H, Jen AKY, Dalton LR (2002) Polymer-based optical waveguides: materials, processing and devices. Adv Mater 14(19):1339–1365CrossRef

Mayer E, Basting D (2000) Excimer-laser advances aid production of fiber gratings. Laser-Focus World, pp 107–110

Meltz G, Morey WW, Glenn WH (1989) Formation of Bragg gratings in optical fibers by transverse holographic method. Opt Lett 14(15):823CrossRef

Metev S, Veiko V (1998) Laser-assisted microtechnology. Springer, Berlin Heidelberg New York

Onari S (1969) Vacuum ultraviolet absorption spectra of synthesized polymer films. J Phys Soc Jpn 26:500–504CrossRef

Othonos A, Kalli K (1999) Fiber Bragg gratings. Artech House, Boston, London

Reichmanis E, Thompson LF (1989) Polymer materials for microlithography. Chem Rev 89:1276–1289CrossRef

Rubahn HG (1996) Laseranwendung in der Oberflächenphysik und Materialbearbeitung

Welder G (1987) Lehrbuch Phys. Chem. VCH-Verlag, Weinheim

Wochnowski C, Metev S, Meteva K, Vollertsen F (2003) UV-laser-assisted fabrication of dispersive structures in polymeric integrated optical components. In: Proceedings of LPM’03, Munich, Germany, SPIE, vol 5063, pp 482–487

Title: Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method
Authors: C. Wochnowski
S. Metev
F. Vollertsen
Publication date: 01-08-2006
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 9/2006
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-006-0165-4

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