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Microsystem Technologies

Issue 9/2006

Content (9 Articles)

Technical Paper

Modeling product variations in hard disk drive micro-actuator suspensions

M. Rotunno, R. Oboe, R. A. de Callafon

Technical paper

Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM

D. M. Cao, J. Jiang, R. Yang, W. J. Meng

Technical paper

Electroplating of micro-patterned tools via replication of silicone rubber forms

J. Lorenz, G. Schanz, N. Holstein, J. Konys

Technical Paper

Mechanical punching of 15 μm size hole

Sang Min Yi, Byung Yun Joo, Min Soo Park, Chong Nam Chu, Soo-Ik Oh

Technical Paper

Fabrication and characterizations of a monolithic PZT microstage

Hegen Xu, Takahito Ono, De-Yuan Zhang, Masayoshi Esashi