Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 4/2021

21-08-2018 | Technical Paper

Synchronization of uncertain MEMS resonators via adaptive time-varying terminal sliding mode control

Authors: Hong-Yi Chen, Kun-Chieh Wang, Hui-Cun Shen, Chi-Hsin Yang

Published in: Microsystem Technologies | Issue 4/2021

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

The main goal of this study addresses the synchronization between two MEMS resonators with cubic and quintic mechanical stiffness under the existence of system uncertainties and external disturbances. The synchronization is obtained by using a novel adaptive time-varying terminal sliding mode control scheme, which includes three time-varying feedback gains can tackle the nonlinear dynamics. Meanwhile, the time-varying feedback gains are updated according to suitable adaptive rules without known bounds of system uncertainties and external disturbances in advance. Based on the Lyapunov stability theory, sufficient conditions to ensure the convergence of the errors between the outputs of master and slave MEMS systems are proven and numerical studies are performed.
previous article Application of blurred circular 3D images on the human vision model
next article Wide field of view lens design with uniform image illumination in capsule endoscope system

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Basu J, Bhattacharyya TK (2011) Microelectromechanical resonators for radio frequency communication applications. Microsyst Technol 17(10–11):1557–1580CrossRef
Chavarette FR, Balthazar JM, Felix JLP, Rafikov M (2009) A reducing of a chaotic movement to a periodic orbit of a micro-electro-mechanical system by using an optimal linear control design. Commun Nonlinear Sci Numer Simul 14:1844–1853CrossRef
De SK, Aluru NR (2005) Complex oscillations and chaos in electrostatic microelectromechanical systems under super harmonic excitations. Phys Rev Lett 94:204101CrossRef
Feng Y, Yu X, Man Z (2002) Non-singular terminal sliding mode control of rigid manipulators. Automatica 38(12):2159–2167MathSciNetCrossRef
Ha QP, Rye DC, Durrant-Whyte HF (1999) Fuzzy moving sliding mode control with application to robotic manipulators. Automatica 35:607–616CrossRef
Haghighi HS, Markazi AHD (2010) Chaos prediction and control in MEMS resonators. Commun Nonlinear Sci Numer Simul 15:3091–3099CrossRef
Jinggang Z, Jiang K, Chen Z, Zhao Z (2006) Global robust fuzzy sliding mode control for a class of non-linear system. Trans Inst Meas Control 28(3):219–227CrossRef
Kloub HA, Hamad EM (2017) Electromechanical modeling and designing of capacitive MEMS DC/AC interactive power inverter for renewable energy applications. Microsyst Technol 23:863–874CrossRef
Luo A, Wang FY (2002) Chaotic motion in a micro-electro-mechanical system with non-linearity from capacitors. Commun Nonlinear Sci Numer Simul 7:31–49CrossRef
Nichol JM, Hemesath ER, Lauhon LJ, Budakian R (2009) Controlling the nonlinearity of silicon nanowire resonators using active feedback. Appl Phys Lett 95:123116CrossRef
Park K, Chen Q, Lai YC (2008) Energy enhancement and chaos control in microelectromechanical system. Phys Rev E 77:026210CrossRef
Sarraf EH, Sharma M, Cretu E (2012) Novel band-pass sliding mode control for driving MEMS-based resonators. Sens Actuators A 186:154–162CrossRef
Shang H, Wen Y (2013) Suppression of chaos in a MEMS resonator by delayed position feedback. Theor Appl Mech Lett 3:063008CrossRef
Siewe MS, Hegazy UH (2011) Homoclinic bifurcation and chaos control in MEMS resonators. Appl Math Model 35:5533–5552MathSciNetCrossRef
Sohanian-Haghighi H, Davaie-Markazi AH (2012) Resonance tracking of nonlinear MEMS resonators. IEEE/ASME Trans Mechatron 17:617–621CrossRef
Tee KP, Ge SS, Tay FEK (2009) Adaptive control of electrostatic microactuators with bidirectional drive. IEEE Trans Control Syst Technol 17(2):340–352CrossRef
Utkin VI (1992) Sliding modes in control and optimization. Springer, Berlin. ISBN 9783642843792CrossRef
Yau HT, Wang CC, Hsieh CT, Cho CC (2011) Nonlinear analysis and control of the uncertain micro-electro-mechanical system by using a fuzzy sliding mode control design. Comput Math Appl 61:1912–1916MathSciNetCrossRef
Zhankui S, Sun K (2013) Nonlinear and chaos control of a micro-electro-mechanical system by using second-order fast terminal sliding mode control. Commun Nonlinear Sci Numer Simul 13:2540–2548MathSciNetCrossRef
Zhu H, Lee JEY (2012) System-level circuit simulation of nonlinearity in micromechanical resonators. Sens Actuators A 186:15–20CrossRef
Metadata
Title
Synchronization of uncertain MEMS resonators via adaptive time-varying terminal sliding mode control
Authors
Hong-Yi Chen
Kun-Chieh Wang
Hui-Cun Shen
Chi-Hsin Yang
Publication date
21-08-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2021
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4088-7

Other articles of this Issue 4/2021

Microsystem Technologies 4/2021 Go to the issue

Technical Paper

Free standing copper incorporated carbon nanofibers based flexible anodes for high performance sodium ion batteries

Technical Paper

Distance measurement on intuitionistic fuzzy granular structure sets

Technical Paper

Gesture recognition based human–robot interactive control for robot soccer

Technical Paper

Optimal displacement amplification ratio of bridge-type compliant mechanism flexure hinge using the Taguchi method with grey relational analysis

Technical Paper

Optimal design and performance analysis of solar power microsystem for mini-grid application

Technical Paper

Exploring supramolecular aggregation behaviour of bioactive thiazolidine-4-carboxylic acid derivatives