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Published in:
1984 | OriginalPaper | Chapter
The Contribution of SIMS to the Characterization of III-V Compounds
Authors : A. M. Huber, G. Morillot, A. Friederich
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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For several years, secondary ion mass spectrometry (SIMS) has been very successfully applied in the electronics industry to the characterization of semiconductor materials. It contributes in particular to the improvement of the III-V materials used in the new electronics industry for microwave and opto-electronic devices. A number of interesting published works provide evidence for this.