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Glass and Ceramics
Published in: Glass and Ceramics 3-4/2019

01-08-2019 | AT ENTERPRISES AND INSTITUTES

Use of Alkaline Glass in Micromechanical Sensor Structures

Author: V. E. Pautkin

Published in: Glass and Ceramics | Issue 3-4/2019

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Abstract

The use of alkali glass in micromechanical sensors, specifically, accelerometers, is shown. Alkali glass is used in the sensitive elements of the indicated devices. The main technological operation in the assembly of such sensitive elements is electrostatic bonding, also known as the anodic bonding. In this process a number of complex physical effects occur in the glass. Reliable functioning of the fabricated devices depends on the quality of the execution of the parts made of alkali glass and silicon.
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Literature
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GOST R 8.596–2002. State System Ensuring Traceability of Measurements. Metrological Provision of Measuring Systems. The Main Provisions [in Russian], Standardinform, Moscow (2002).
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E. A. Mokrov and A. A. Papko, “Accelerometers of the Research Institute for Physical Measurements—elements of microsystem engineering,” Mikrosistemnaya Tekhnika, No. 1, 3 (2002).
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S. A. Kozin, A. V. Fedulov, and V. E. Pautkin, “Development of technology and special equipment for joining silicon with glass in a high-voltage field,” Datchiki i Sistemy, No. 9, 46 – 47 (2005).
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B. M. Yavorskii and A. A. Detlaf, Physics Handbook for Engineers and University Students [in Russian], Oniks, Moscow (2006).
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A. N. Tabenkin, S. B. Tarasov, and S. N. Stepanov, Roughness, Waviness, Profile: International Experience [in Russian], Izd. Politekh. Univer., St. Petersburg (2007).
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E. P. Prokop’ev, S. P. Timoshenkov, A. L. Suvorov, et al., Features of the Technology for Manufacturing SOI Structures by Direct Splicing and Quality Control of Silicon Wafers [in Russian], Institute of Theoretical and Experimental Physics, Moscow (2000).
Metadata
Title
Use of Alkaline Glass in Micromechanical Sensor Structures
Author
V. E. Pautkin
Publication date
01-08-2019
Publisher
Springer US
Published in
Glass and Ceramics / Issue 3-4/2019
Print ISSN: 0361-7610
Electronic ISSN: 1573-8515
DOI
https://doi.org/10.1007/s10717-019-00151-0

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