A Figure of Merit for Flash Memory Multi-Layer Tunnel Dielectrics | springerprofessional.de

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2001 | OriginalPaper | Chapter

A Figure of Merit for Flash Memory Multi-Layer Tunnel Dielectrics

Authors : B. Govoreanu, P. Blomne, M. Rosmeulen, J. Van Houdt, K. De Meyer

Published in: Simulation of Semiconductor Processes and Devices 2001

Publisher: Springer Vienna

Included in: Professional Book Archive

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In this paper a figure of merit for evaluating the performance of multi-layer tunnel dielectrics for Flash memory applications is proposed. Further analysis provides an in-depth understanding of the multi-layer stacks and allows to select the most suitable stack for memory application.

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Title: A Figure of Merit for Flash Memory Multi-Layer Tunnel Dielectrics
Authors: B. Govoreanu
P. Blomne
M. Rosmeulen
J. Van Houdt
K. De Meyer
Publisher: Springer Vienna
Book: Simulation of Semiconductor Processes and Devices 2001
Print ISBN: 978-3-7091-7278-0

Electronic ISBN: 978-3-7091-6244-6

Copyright Year: 2001
DOI: https://doi.org/10.1007/978-3-7091-6244-6_60