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Microsystem Technologies

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01-01-2013 | Technical Paper

Analysis of an in-plane micro-generator with various microcoil shapes

Authors: Y. J. Chen, C. T. Pan, Z. H. Liu

Published in: Microsystem Technologies | Issue 1/2013

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Abstract

This study presents an analysis of an in-plane micro-generator with various microcoil shapes and multiple aspects of coupling, and reports the fabrication of a prototype micro-generator. It is important to establish analytical solutions for the micro-generator to predict the induced voltage. These analytical solutions can be used to estimate the micro-generator power to reduce the experimental time and the cost. Understanding the physical meanings of the variables can optimize the structure of the micro-electromagnetic generator. This model considers electromagnetism, kinematics, and geometry. The proposed in-plane rotary electromagnetic micro-generator was fabricated using low-temperature co-fired ceramic technology to co-fire the silver microcoils on the ceramic substrate with different shaped coils (e.g., square-shaped, circle-shaped and sector-shaped) both with the printing linewidth and 100 μm spacing of these microcoils. A planar permanent magnet with an outer diameter of 9 mm and a thickness of 700 μm was sintered by Nd/Fe/B. Its residual induction is 1.4 T. The experimental data in this study can be compared with analytical solutions. Analytical results show that the micro-generator with a sector-shaped microcoil generates a maximum effective value of 218.127 mV induced voltage at 1395.34 rad/s. Experimental measurements show a close agreement with these analytical solutions.

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Title: Analysis of an in-plane micro-generator with various microcoil shapes
Authors: Y. J. Chen
C. T. Pan
Z. H. Liu
Publication date: 01-01-2013
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 1/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-012-1635-5

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