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Microsystem Technologies
Published in: Microsystem Technologies 1/2013

01-01-2013 | Technical Paper

Testing of MEMS capacitive accelerometer structure through electro-static actuation

Authors: Sougata Kumar Kar, K. B. M. Swamy, Banibrata Mukherjee, Siddhartha Sen

Published in: Microsystem Technologies | Issue 1/2013

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Abstract

The present paper discusses a method for testing a MEMS capacitive accelerometer structure through electrical actuation. The response of a standard MEMS capacitive accelerometer structure for different electrical actuation voltages has been analyzed. The accelerometer structure along with a capacitance sensing integrated circuit (IC) MS3110 is modeled and simulated. A set of proto-type accelerometer structures is fabricated and packaged in PGA packages. The packaged MEMS structures and MS3110 IC are integrated on a printed circuit board. The MEMS structure is actuated by applying the electrical signal through the actuation fingers and the change in capacitance is measured by the MS3110 IC. The simulated and measured results show some interesting phenomenon like dipping and frequency doubling which are useful for initial testing and characterization of a MEMS accelerometer structure.
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Literature
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Metadata
Title
Testing of MEMS capacitive accelerometer structure through electro-static actuation
Authors
Sougata Kumar Kar
K. B. M. Swamy
Banibrata Mukherjee
Siddhartha Sen
Publication date
01-01-2013
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 1/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1611-0

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