Top

Published in:

18-03-2024 | Original Research Article

Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO₃ Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications

Authors: K. Naveen Kumar, G. V. Ashok Reddy, Sheik Abdul Sattar, R. Imran Jafri, R. Premkumar, M. Muthukrishnan, A. Asrar Ahamed, M. R. Meera, Nunna Guru Prakash, Ammar M. Tighezza, Tae Jo Ko

Published in: Journal of Electronic Materials | Issue 5/2024

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

In this work, tungsten oxide (WO₃) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO₃ films immersed in the two different electrolyte solutions (H₂SO₄ and LiClO₄ with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H₂SO₄ electrolyte of an annealed WO₃ thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm²/C, and the LiClO₄ electrolyte of an annealed WO₃ thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm²/C.

previous article Tunable Color Emissions upon UV Irradiation from Tb3+:Y2SiO5 Phosphor

next article A DFT Study on Armchair Nanoribbon Structures of TiN, ZrN, and HfN

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

T. Brousse, D. Bélanger, K. Chiba, M. Egashira, F. Favier, J. Long, J.R. Miller, M. Morita, K. Naoi, P. Simon, and W. Sugimoto, Materials for electrochemical capacitors. Springer Handbooks (2017). https://doi.org/10.1007/978-3-662-46657-5_16.CrossRef

R.S. Vemuri, M.H. Engelhard, and C.V. Ramana, Correlation between surface chemistry, density, and band gap in nanocrystalline WO₃ thin films. ACS Appl. Mater. Interfaces 4, 1371 (2012). https://doi.org/10.1021/am2016409.CrossRefPubMed

C.G. Granqvist, Oxide electrochromics: an introduction to devices and materials. Sol. Energy Mater. Sol. Cells 99, 1 (2012). https://doi.org/10.1016/j.solmat.2011.08.021.CrossRef

J. Gupta, H. Shaik, and K.N. Kumar, A review on the prominence of porosity in tungsten oxide thin films for electrochromism. Ionics (Kiel) 27, 2307 (2021). https://doi.org/10.1007/s11581-021-04035-8.CrossRef

J. Gutpa, H. Shaik, K.N. Kumar, and S. Abdul, Materials Science in Semiconductor Processing PVD techniques proffering avenues for fabrication of porous tungsten oxide (WO₃) thin films : a review. Mater. Sci. Semicond. Process. 143, 106534 (2022). https://doi.org/10.1016/j.mssp.2022.106534.CrossRef

M. Grätzel, Ultrafast colour displays. Nature 409, 575 (2001). https://doi.org/10.1038/35054655.CrossRefPubMed

C.G. Granqvist, Electrochromics for smart windows: oxide-based thin films and devices. Thin Solid Films 564, 1 (2014). https://doi.org/10.1016/j.tsf.2014.02.002.CrossRef

G.A. Niklasson and C.G. Granqvist, Electrochromics for smart windows :thin films of tungsten oxide and nickel oxide, and devices based on these. J. Mater. Chem. 17(2), 127 (2007). https://doi.org/10.1039/b612174h.CrossRef

C.G. Granqvist, Electrochromic tungsten oxide films: review of progress 1993–1998. Sol. Energy Mater. Sol. Cells 60, 201 (2000). https://doi.org/10.1016/S0927-0248(99)00088-4.CrossRef

10.

H. Simchi, B.E. McCandless, T. Meng, and W.N. Shafarman, Structural, optical, and surface properties of WO₃ thin films for solar cells. J. Alloy. Compd. 617, 609 (2014). https://doi.org/10.1016/j.jallcom.2014.08.047.CrossRef

11.

Y.A.K. Reddy, B. Ajitha, A. Sreedhar, and E. Varrla, Enhanced UV photodetector performance in bi-layer TiO₂/WO₃ sputtered films. Appl. Surf. Sci. 494, 575 (2019). https://doi.org/10.1016/j.apsusc.2019.07.124.CrossRef

12.

A.V. Shchegolkov, S.H. Jang, A.V. Shchegolkov, Y.V. Rodionov, A.O. Sukhova, and M.S. Lipkin, A brief overview of electrochromic materials and related devices: a nanostructured materials perspective. Nanomaterials 11, 2376 (2021). https://doi.org/10.3390/nano11092376.CrossRefPubMedPubMedCentral

13.

A.R. GV, H. Shaik, K.N. Kumar, V. Madhavi, H.D. Shetty, S.A. Sattar, M. Dhananjaya, B. Daruka Prasad, G.R. Kumar, and B.H. Doreswamy, Structural and electrochemical studies of WO₃ coated TiO₂ nanorod hybrid thin films for electrochromic applications. Optik 277, 170694 (2023). https://doi.org/10.1016/j.ijleo.2023.170694.CrossRef

14.

K. Naveen Kumar, H. Shaik, A. Pawar, L.N. Chandrashekar, S.A. Sattar, G. Nithya, R. Imran Jafri, V. Madhavi, J. Gupta, and G.V. Ashok Reddy, Effect of annealing and oxygen partial pressure on the RF sputtered WO₃ thin films for electrochromic applications. Mater. Today: Proc. 59, 339 (2022). https://doi.org/10.1016/j.matpr.2021.11.185.CrossRef

15.

K. Naveen Kumar, H. Shaik, L.N. Chandrashekar, P. Aishwarya, S. Abdul Sattar, G. Nithya, V. Madhavi, R. Imran Jafri, J. Gupta, and G.V. Ashok Reddy, On ion transport during the electrochemical reaction on plane and GLAD deposited WO₃ thin films. Mater. Today Proc. 59, 275 (2022). https://doi.org/10.1016/j.matpr.2021.11.113.CrossRef

16.

L. Geng, Gas sensitivity study of polypyrrole/WO₃ hybrid materials to H2S. Synth. Met. 160, 1708 (2010). https://doi.org/10.1016/j.synthmet.2010.06.005.CrossRef

17.

M. Trapatseli, D. Vernardou, P. Tzanetakis, and E. Spanakis, Field emission properties of low-temperature, hydrothermally grown tungsten oxide. ACS Appl. Mater. Interfaces 3, 2726 (2011). https://doi.org/10.1021/am200519w.CrossRefPubMed

18.

R. Mukherjee and P.P. Sahay, Improved electrochromic performance in sprayed WO₃ thin films upon Sb doping. J. Alloy. Compd. 660, 336 (2016). https://doi.org/10.1016/j.jallcom.2015.11.138.CrossRef

19.

N. Naseri, R. Azimirad, O. Akhavan, and A.Z. Moshfegh, Improved electrochromical properties of sol-gel WO₃ thin films by doping gold nanocrystals. Thin Solid Films 518, 2250 (2010). https://doi.org/10.1016/j.tsf.2009.08.001.CrossRef

20.

J. Thangala, S. Vaddiraju, R. Bogale, R. Thurman, T. Powers, B. Deb, and M.K. Sunkara, Large-scale, hot-filament-assisted synthesis of tungsten oxide and related transition metal oxide nanowires. Small 3, 890 (2007). https://doi.org/10.1002/smll.200600689.CrossRefPubMed

21.

J. Zhang, X.L. Wang, X.H. Xia, C.D. Gu, Z.J. Zhao, and J.P. Tu, Enhanced electrochromic performance of macroporous WO₃ films formed by anodic oxidation of DC-sputtered tungsten layers. Electrochim. Acta 55, 6953 (2010). https://doi.org/10.1016/j.electacta.2010.06.082.CrossRef

22.

K. Naveen Kumar, H. Shaik, Sathish, V. Madhavi, and S. Abdul Sattar, On the bonding and electrochemical performance of sputter deposited WO₃ thin films. IOP Conf. Ser. Mater. Sci. Eng. 872, 012147 (2020). https://doi.org/10.1088/1757-899X/872/1/012147.CrossRef

23.

K.N. Kumar, S.A. Sattar, G.V. Ashok Reddy, R.I. Jafri, R. Premkumar, M.R. Meera, A.A. Ahamed, M. Muthukrishnan, M. Dhananjaya, and A.M. Tighezza, Structural, optical, and electrochromic properties of RT and annealed sputtered tungsten trioxide (WO3) thin films for electrochromic applications by using GLAD technique. J. Mater. Sci. Mater. Electron. 34, 1934 (2023). https://doi.org/10.1007/s10854-023-11285-x.CrossRef

24.

K.N. Kumar, G. Nithya, H. Shaik, L.N. Chandrashekar, P. Aishwarya, and A.S. Pawar, Optical and electrochromic properties of DC magnetron sputter deposited tungsten oxide thin films at different electrolyte concentrations and vertex potentials for smart window applications. J. Mater. Sci. Mater. Electron. 34, 789 (2023). https://doi.org/10.1007/s10854-023-10180-9.CrossRef

25.

A.R. GV, K.N. Kumar, S. Abdul, H.D. Shetty, N. Guru, R.I. Jafri, C. Devaraja, B.C. Manjunatha, C.S. Kaliprasad, R. Premkumar, and S. Ansar, Physica B: condensed Matter Effect of post annealing on DC magnetron sputtered tungsten oxide (WO₃) thin films for smartwindow applications. Phys. B Condens Matter 664, 414996 (2023). https://doi.org/10.1016/j.physb.2023.414996.CrossRef

26.

K.N. Kumar, H. Shaik, J. Gupta, S. Abdul, I. Jafri, A. Pawar, V. Madhavi, A.R. GV, and G. Nithya, Sputter deposited tungsten oxide thin films and nanopillars: electrochromic perspective. Mater. Chem. Phys. 278, 125706 (2022). https://doi.org/10.1016/j.matchemphys.2022.125706.CrossRef

27.

K. Naveen Kumar, G. Nithya, H. Shaik, B. Hemanth, M. Chethana, K. Kishore, V. Madhavi, R.I. Jafri, S.A. Sattar, J. Gupta, and G.V. Ashok Reddy, Simulation and fabrication of tungsten oxide thin films for electrochromic applications. Phys. B Condens Matter 640, 413932 (2022). https://doi.org/10.1016/j.physb.2022.413932.CrossRef

28.

K.N. Kumar, S.A. Sattar, H. Shaik, A.R. GV, R.I. Jafri, M. Dhananjaya, A.S. Pawar, N.G. Prakash, R. Premkumar, S. Ansar, L.N. Chandrashekar, and P. Aishwarya, Effect of partial pressure of oxygen, target current, and annealing on DC sputtered tungsten oxide (WO₃) thin films for electrochromic applications. Solid State Ion 399, 116275 (2023). https://doi.org/10.1016/j.ssi.2023.116275.CrossRef

29.

G.V. Ashok Reddy, H. Shaik, K. Naveen Kumar, R. Imran Jafri, S.A. Sattar, J. Gupta, and B.H. Doreswamy, Thickness dependent tungsten trioxide thin films deposited using DC magnetron sputtering for electrochromic applications. Mater. Today Proc. (2022). https://doi.org/10.1016/j.matpr.2022.11.134.CrossRef

30.

K. Naveen Kumar, H. Shaik, V. Madhavi, R. Imran Jafri, J. Gupta, G. Nithya, S.A. Sattar, and G.V. Ashok Reddy, Glancing angle sputter deposited tungsten trioxide (WO₃) thin films for electrochromic applications. Appl. Phys. A Mater. Sci. Process. 128, 1 (2022). https://doi.org/10.1007/s00339-022-06124-5.CrossRef

31.

G. Nithya, K.N. Kumar, R. Sai Yashwanth, W. Baig, S.V. Sai Ganesh, S. Hanvish Kumar, Simulation, deposition, and characterization of WO₃ and multilayered WO₃/Ag thin film structure for smart window applications, in: 2023 International Conference on Recent Advances in Science and Engineering Technology (ICRASET, IEEE, 2023), pp. 1–3. https://doi.org/10.1109/ICRASET59632.2023.10420072.

32.

V. Madhavi, P. Kondaiah, H. Shaik, K.N. Kumar, T.S.S. Kumar Naik, G.M. Rao, and P.C. Ramamurthy, Fabrication of porous 1D WO₃ NRs and WO₃/BiVO₄ hetero junction photoanode for efficient photoelectrochemical water splitting. Mater. Chem. Phys. 274, 125095 (2021). https://doi.org/10.1016/j.matchemphys.2021.125095.CrossRef

33.

34.

J. Gupta, H. Shaik, K.N. Kumar, S.A. Sattar, and G.V.A. Reddy, Optimization of deposition rate for E-beam fabricated tungsten oxide thin films towards profound electrochromic applications. Appl. Phys. A Mater. Sci. Process. 128, 1 (2022). https://doi.org/10.1007/s00339-022-05609-7.CrossRef

35.

J. Gutpa, H. Shaik, K. Naveen Kumar, and S.A. Sattar, Optimization of GLAD angle for E-beam-fabricated Tungsten oxide (WO₃) thin films towards novel electrochromic behavior. J. Electron. Mater. (2022). https://doi.org/10.1007/s11664-022-10036-8.CrossRef

36.

J.Z. Ou, S. Balendhran, M.R. Field, D.G. McCulloch, A.S. Zoolfakar, R.A. Rani, S. Zhuiykov, A.P. O’Mullane, and K. Kalantar-Zadeh, The anodized crystalline WO₃ nanoporous network with enhanced electrochromic properties. Nanoscale 4, 5980 (2012). https://doi.org/10.1039/c2nr31203d.CrossRefPubMed

37.

J. Zhang, J.P. Tu, X.H. Xia, X.L. Wang, and C.D. Gu, Hydrothermally synthesized WO₃ nanowire arrays with highly improved electrochromic performance. J. Mater. Chem. 21, 5492 (2011). https://doi.org/10.1039/c0jm04361c.CrossRef

38.

A.R. GV, K. Naveen Kumar, H. Shaik, H.D. Shetty, R. Imran Jafri, S. Abdul Sattar, K. Kamath, and B.H. Doreswamy, Growth of cerium oxide nanorods by hydrothermal method and electrochromic properties of CeO₂/WO₃ hybrid thin films for smart window applications. Mater. Today Proc. (2022). https://doi.org/10.1016/j.matpr.2022.11.316.CrossRef

39.

G.V. Ashok Reddy, S.A. Sattar, K. Naveen Kumar, C.S. KaliPrasad, C. Devaraja, R. Imran Jafri, and B.H. Doreswamy, Effect of tungsten oxide thin films deposited on cerium oxide nano rods for electrochromic applications. Opt. Mater. 134, 113220 (2022). https://doi.org/10.1016/j.optmat.2022.113220.CrossRef

40.

A.R. GV, K.N. Kumar, H. Shaik, R.I. Jafri, R. Naik, and B.H. Doreswamy, Optical and electrochromic properties of CeO₂/WO₃ hybrid thin films prepared by hydrothermal and sputtering. Int. J. Eng. Trends Technol. 70, 1 (2022).CrossRef

41.

G.V. Ashok Reddy, K.N. Kumar, S.A. Sattar, N.G. Prakash, B. Daruka Prasad, M. Dhananjaya, G.R. Kumar, H.S. Yogananda, S.M. Hunagund, and S. Ansar, Structural, optical, and electrochromic properties of rare earth material (CeO₂)/transitional metal oxide (WO₃) thin film composite structure for electrochromic applications. Ionics (2023). https://doi.org/10.1007/s11581-023-05078-9.CrossRef

42.

G.F. Cai, J.P. Tu, D. Zhou, X.L. Wang, and C.D. Gu, Growth of vertically aligned hierarchical WO₃ nano-architecture arrays on transparent conducting substrates with outstanding electrochromic performance. Sol. Energy Mater. Sol. Cells 124, 103 (2014). https://doi.org/10.1016/j.solmat.2014.01.042.CrossRef

43.

V. Madhavi, P. Kondaiah, O.M. Hussain, and S. Uthanna, Structural, optical, and luminescence properties of reactive magnetron sputtered tungsten oxide thin films. Int. Scholar. Res. Not. 2012, 1 (2012). https://doi.org/10.5402/2012/801468.CrossRef

44.

S.H. Mohamed, H.A. Mohamed, and H.A. Abd El Ghani, Development of structural and optical properties of WOx films upon increasing oxygen partial pressure during reactive sputtering. Phys. B 406, 831 (2011). https://doi.org/10.1016/j.physb.2010.12.005.CrossRef

45.

S.H. Lee, H.M. Cheong, C.E. Tracy, A. Mascarenhas, D.K. Benson, and S.K. Deb, Raman spectroscopic studies of electrochromic a-WO₃. Electrochim. Acta 44, 3111 (1999). https://doi.org/10.1016/S0013-4686(99)00027-4.CrossRef

46.

J. Gabrusenoks, A. Veispals, A. Von Czarnowski, and K.H. Meiwes-Broer, Infrared and Raman spectroscopy of WO₃ and CdWO₄. Electrochim. Acta 46, 2229 (2001). https://doi.org/10.1016/S0013-4686(01)00364-4.CrossRef

47.

R. Chandra, A.K. Chawla, and P. Ayyub, Optical and structural properties of sputter-deposited nanocrystalline Cu₂O films: effect of sputtering gas. J. Nanosci. Nanotechnol. 6, 1119 (2006). https://doi.org/10.1166/jnn.2006.176.CrossRefPubMed

48.

A.K. Chawla, S. Singhal, H.O. Gupta, and R. Chandra, Effect of sputtering gas on structural and optical properties of nanocrystalline tungsten oxide films. Thin Solid Films 517, 1042 (2008). https://doi.org/10.1016/j.tsf.2008.06.068.CrossRef

49.

M.B. Babu and K.V. Madhuri, Synthesis and electrochromic properties of nanocrystalline WO₃ thin films. Phys. B Condens. Matter 584, 412068 (2020). https://doi.org/10.1016/j.physb.2020.412068.CrossRef

50.

C.K. Wang, D.R. Sahu, S.C. Wang, C.K. Lin, and J.L. Huang, Structural evolution and chemical bonds in electrochromic WO₃ films during electrochemical cycles. J. Phys. D Appl. Phys. 45, 225303 (2012). https://doi.org/10.1088/0022-3727/45/22/225303.CrossRef

51.

K.J. Patel, G.G. Bhatt, S.S. Patel, R.R. Desai, J.R. Ray, C.J. Panchal, P. Suryavanshi, V.A. Kheraj, and A.S. Opanasyuk, Thickness-dependent electrochromic properties of amorphous tungsten trioxide thin films. J. Nano Electron. Phys. 9, 03040 (2017). https://doi.org/10.21272/jnep.9(3).03040.CrossRef

52.

V. Madhavi, P. Kondaiah, O.M. Hussain, and S. Uthanna, Structural, optical and electrochromic properties of RF magnetron sputtered WO₃ thin films. Phys. B 454, 141 (2014). https://doi.org/10.1016/j.physb.2014.07.029.CrossRef

53.

C.S. Hsu, C.C. Chan, H.T. Huang, C.H. Peng, and W.C. Hsu, Electrochromic properties of nanocrystalline MoO₃ thin films. Thin Solid Films 516, 4839 (2008). https://doi.org/10.1016/j.tsf.2007.09.019.CrossRef

54.

B. Wen-Cheun Au, A. Tamang, D. Knipp, and K.Y. Chan, Post-annealing effect on the electrochromic properties of WO₃ films. Opt. Mater. 108, 110426 (2020). https://doi.org/10.1016/j.optmat.2020.110426.CrossRef

55.

X. Sun, Z. Liu, and H. Cao, Electrochromic properties of N-doped tungsten oxide thin films prepared by reactive DC-pulsed sputtering. Thin Solid Films 519, 3032 (2011). https://doi.org/10.1016/j.tsf.2010.12.017.CrossRef

Title: Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO3 Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications
Authors: K. Naveen Kumar
G. V. Ashok Reddy
Sheik Abdul Sattar
R. Imran Jafri
R. Premkumar
M. Muthukrishnan
A. Asrar Ahamed
M. R. Meera
Nunna Guru Prakash
Ammar M. Tighezza
Tae Jo Ko
Publication date: 18-03-2024
Publisher: Springer US
Published in: Journal of Electronic Materials / Issue 5/2024
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI: https://doi.org/10.1007/s11664-024-11000-4

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 5/2024

p-Si/n-CrSe2 Heterojunctions Designed as High-Frequency Capacitors and Photosensors

Studies on the Growth, Spectral and Optical Characteristics of Isobutylammonium Hydrogen Oxalate Hemihydrate Single Crystals

Design and Performance Analysis of a High-temperature Sensor with a Low-temperature Coefficient of Frequency

A Dual-Band Terahertz Metamaterial Absorber Using an All-Metal Aluminum Hexagonal Metasurface Structure for Sensing of Cancerous Cells

Tunable Color Emissions upon UV Irradiation from Tb3+:Y2SiO5 Phosphor

High-Performance Microwave Absorption Properties of Pyramid-Shaped Metamaterials Based on Ni-Foam@Fe3O4