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Journal of Materials Science: Materials in Electronics
Published in: Journal of Materials Science: Materials in Electronics 10/2014

01-10-2014

Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films

Authors: Ping Tang, Chuankai Qiu, Jingjing He, Tiejun Zhang, Xiao Feng, Xiangang Luo

Published in: Journal of Materials Science: Materials in Electronics | Issue 10/2014

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Abstract

The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/□ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C.
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Metadata
Title
Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films
Authors
Ping Tang
Chuankai Qiu
Jingjing He
Tiejun Zhang
Xiao Feng
Xiangang Luo
Publication date
01-10-2014
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 10/2014
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-014-2175-9

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