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Microsystem Technologies

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30-09-2016 | Technical Paper

Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate

Authors: S. J. Young, Z. D. Lin

Published in: Microsystem Technologies | Issue 1/2018

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Abstract

In this study, ethanol gas sensors were fulfilled by utilizing the vertically aligned carbon nanotubes (CNTs). CNTs were synthesized by thermal chemical vapor deposition (CVD) at 700 °C under C₂H₂ atmosphere. From field-emission scanning electron microscope (FESEM), it was found that the average length and average diameter of the CNTs were about 4.52 μm and 45 nm, respectively. Further, carbon nanotube ethanol gas sensors were fabricated. Under 800 ppm ethanol vapor concentration and at room temperature, it was found that the sensitivity of the carbon nanotube ethanol gas sensor was 1.67 %.

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Title: Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate
Authors: S. J. Young
Z. D. Lin
Publication date: 30-09-2016
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 1/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-016-3154-2

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