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Journal of Materials Engineering and Performance

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01-10-2013

Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates

Authors: Xiaolu Pang, Hongjian Ma, Kewei Gao, Huisheng Yang, Xiaolei Wu, Alex A. Volinsky

Published in: Journal of Materials Engineering and Performance | Issue 10/2013

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Abstract

Al-doped zinc oxide films (AZO) of different thicknesses were deposited by reactive magnetron sputtering on glass substrates. Fracture toughness and adhesion of transparent AZO films were measured by indentation in air and water. Fracture toughness of glass is about 0.63 MPa·m^1/2. Under the same normal load, radial crack length shortened with the increase of AZO film thickness. When indented under deionized water, cracks in both glass and AZO films got longer, signifying corresponding decrease in the fracture toughness.

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Title: Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates
Authors: Xiaolu Pang
Hongjian Ma
Kewei Gao
Huisheng Yang
Xiaolei Wu
Alex A. Volinsky
Publication date: 01-10-2013
Publisher: Springer US
Published in: Journal of Materials Engineering and Performance / Issue 10/2013
Print ISSN: 1059-9495
Electronic ISSN: 1544-1024
DOI: https://doi.org/10.1007/s11665-013-0603-2

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