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Microsystem Technologies

Issue 6/2023

Content (11 Articles)

Technical Paper

Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers

Zhenyu Liu, Yusi Zhu, Lidong Du, Zhan Zhao, Zhen Fang

Correction

Correction: Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers

Zhenyu Liu, Yusi Zhu, Lidong Du, Zhan Zhao, Zhen Fang

Technical Paper

Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio

Zhongliang Deng, Chengqi Lai, Jiali Zhou, Yucheng Wang

Technical Paper

A CMPA based cost-effective photovoltaic power generation system and utilization

Avijit Karmakar, Pradip Kumar Sadhu, Soumya Das

Retraction Note

Retraction Note: A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

Noraini Marsi, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Faisal Mohd-Yasin