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Microsystem Technologies
Published in: Microsystem Technologies 8/2017

11-01-2017 | Technical Paper

Modeling and tracking control of a novel XYθz stage

Authors: Kunhai Cai, Yanling Tian, Fujun Wang, Dawei Zhang, Xianping Liu, Bijan Shirinzadeh

Published in: Microsystem Technologies | Issue 8/2017

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Abstract

A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.
previous article Evolution, modelling and simulation of MEMS PWM pressure sensor employing cantilever switch and SOI diaphragm
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Metadata
Title
Modeling and tracking control of a novel XYθz stage
Authors
Kunhai Cai
Yanling Tian
Fujun Wang
Dawei Zhang
Xianping Liu
Bijan Shirinzadeh
Publication date
11-01-2017
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2017
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3258-8

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