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Microsystem Technologies
Erschienen in: Microsystem Technologies 8/2017

11.01.2017 | Technical Paper

Modeling and tracking control of a novel XYθz stage

verfasst von: Kunhai Cai, Yanling Tian, Fujun Wang, Dawei Zhang, Xianping Liu, Bijan Shirinzadeh

Erschienen in: Microsystem Technologies | Ausgabe 8/2017

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Abstract

A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.
Vorheriger Artikel Evolution, modelling and simulation of MEMS PWM pressure sensor employing cantilever switch and SOI diaphragm
Nächster Artikel Design and optimization of a novel magnetically-actuated micromanipulator

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Metadaten
Titel
Modeling and tracking control of a novel XYθz stage
verfasst von
Kunhai Cai
Yanling Tian
Fujun Wang
Dawei Zhang
Xianping Liu
Bijan Shirinzadeh
Publikationsdatum
11.01.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3258-8

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