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Microsystem Technologies

Ausgabe 8/2017

Inhalt (70 Artikel)

Design and experimental research on piezoelectric pump with triple vibrators

  • Technical Paper

Jing Shi Dong, Wen Hua Chen, Ping Zeng, Rui Gang Liu, Chuanliang Shen, Wei Shuai Liu, Quan Qu Chen, Yang Yang, Yue Wu, Zhi Gang Yang, Bai Song Lin

Pristine ZnO and SnO2 films for sensing of volatile organic compounds

  • Technical Paper

Rahul Prajesh, Vinay Goyal, Jitendra Bhargava, Ashok Sharma, Ajay Agarwal

Experimental study on the drag reduction effect of a rotating superhydrophobic surface in micro gap flow field

  • Technical Paper

Chunze Wang, Fei Tang, Pengfei Hao, Qi Li, Xiaohao Wang

Fabrication and effect study of microfluidic SERS chip with integrated surface liquid core optical waveguide modified with nano gold

  • Technical Paper

Chunyan Wang, Yi Xu, Rong Wang, Huazhou Zhao, Songtao Xiang, Li Chen, Xueqiang Qi

Design and experiment of a PDMS-based PCR chip with reusable heater of optimized electrode

  • Technical Paper

Feng Cui, Wei Chen, Xiaosheng Wu, Zhaoxin Guo, Wu Liu, Weiping Zhang, Wenyuan Chen

Effects of pulse voltage on piezoelectric micro-jet for lubrication

  • Technical Paper

Kai Li, Jun-kao Liu, Wei-shan Chen, Lu Zhang

An effective system-level vibration prediction analysis approach for data storage system chassis

  • Technical Paper

Jiaping Yang, Cheng Peng Tan, Zhimin He, Zhi Yong Ching, Chye Chin Tan

Mixing performance of T, Y, and oriented Y-micromixers with spatially arranged outlet channel: evaluation with Villermaux/Dushman test reaction

  • Technical Paper

Masoud Rahimi, Neda Azimi, Mohammad Amin Parsamogadam, Alireza Rahimi, Mohammad Moein Masahy

Dimensionless model for impedimetric sensing of particle laden droplets in digital microfluidic devices

  • Technical Paper

Emrys Scott-Murrell, David Lanza, Michael J. Schertzer

Superior performance of a MEMS-based solid propellant microthruster (SPM) array with nanothermites

  • Technical Paper

Chengbo Ru, Fei Wang, Jianbing Xu, Ji Dai, Yun Shen, Yinghua Ye, Peng Zhu, Ruiqi Shen

Analysis and design of a high power laser interrupter for MEMS based safety and arming systems

  • Technical Paper

Xiaodong Zhou, Tiqiang Shan, Xinglin Qi, Liang Cui

Effect of gas rarefaction on the quality factors of micro-beam resonators

  • Technical Paper

Chi Cuong Nguyen, Wang Long Li

Micro pressure sensor with three degrees of freedom resonator

  • Technical Paper

Y. Sujan, G. Uma, M. Umapathy

Capacitive MEMS absolute pressure sensor using a modified commercial microfabrication process

  • Technical Paper

Adel Merdassi, Charles Allan, Edward J. Harvey, Vamsy P. Chodavarapu

Mechanical design of a novel MEMS resonant sensor for monitoring in-plane magnetic fields

  • Technical Paper

V. O. Alvarado-Rosas, A. L. Herrera-May, L. A. Aguilera-Cortés

Optimally catalyzed porous-silicon electrode of self-breathing micro fuel cells

  • Technical Paper

Zaoxi Yu, Dan Zheng, Kun Zhang, Tingfang Yang, Ying Chen, Xinxin Li

The effects of optical and material properties on designing of a photonic crystal mechanical sensor

  • Technical Paper

Longqiu Li, Tianlong Li, Fengtong Ji, Wenping Song, Guangyu Zhang, Yao Li

A size-dependent nonlinear third-order shear-deformable dynamic model for a microplate on an elastic medium

  • Technical Paper

Mergen H. Ghayesh, Hamed Farokhi, Shahid Hussain, Alireza Gholipour, Maziar Arjomandi

Calibration and data processing technology of gyroscope in dual axis rotational inertial navigation system

  • Technical Paper

Chen Jing, Wang Lei, Liu Zengjun, Su Guohua, Cao Guojie

Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

  • Technical Paper

Wenyin Li, Dingbang Xiao, Xuezhong Wu, Jianbin Su, Zhihua Chen, Zhanqiang Hou, Xinghua Wang

AC magnetohydrodynamic slip flow in microchannel with sinusoidal roughness

  • Technical Paper

Mandula Buren, Yongjun Jian, Long Chang, Quansheng Liu, Guangpu Zhao

Design, simulation and fabrication of MEMS based dielectrophoretic separator for bio-particles

  • Technical Paper

Paridhi Puri, Vijay Kumar, M. Ananthasubramanian, N. N. Sharma

Effect of the rotation of generalized thermoelastic layer subjected to harmonic heat: state-space approach

  • Technical Paper

M. A. H. Ismail, A. K. Khamis, A. A. El-Bary, H. M. Youssef

Reduced graphene oxide–multiwalled carbon nanotubes composites as sensing membrane electrodes for DNA detection

  • Technical Paper

Saeed S. Ba Hashwan, A. Rahim Ruslinda, M. F. Fatin, M. K. Md. Arshad, Uda Hashim

A low frequency piezoelectric energy harvester with trapezoidal cantilever beam: theory and experiment

  • Technical Paper

Guangyi Zhang, Shiqiao Gao, Haipeng Liu, Shaohua Niu

Size-dependent large-amplitude oscillations of microcantilevers

  • Technical Paper

Mergen H. Ghayesh, Hamed Farokhi

A chemiresistive glucose sensor fabricated by inkjet printing

  • Technical Paper

Edward Song, Tallis H. da Costa, Jin-Woo Choi

Computing the pull-in voltage of fixed–fixed micro-actuators by artificial neural network

  • Technical Paper

Cevher Ak, Ali Yıldız, Ali Akdağlı, Mustafa Berkan Biçer

Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor

  • Technical Paper

Mitsuhiro Shikida, Pilyoung Kim, Shunji Shibata

Modeling and tracking control of a novel XYθz stage

  • Technical Paper

Kunhai Cai, Yanling Tian, Fujun Wang, Dawei Zhang, Xianping Liu, Bijan Shirinzadeh

Design and optimization of a novel magnetically-actuated micromanipulator

  • Technical Paper

Mohammad Al Mashagbeh, Thamir Al-dulaimi, Mir Behrad Khamesee

Fabrication, calibration and proof experiments in hypersonic wind tunnel for a novel MEMS skin friction sensor

  • Technical Paper

Xiong Wang, Tao Zhu, Xiaobin Xu, Yunlong Shi, Huacheng Qiu, Mengchun Pan

Semi-automatic wafer examination procedure for non-destructive control of spray coating processes

  • Technical Paper

S. Proschwitz, M. Schönfeld, S. Schubert, R. Heimburger, J. Grimm, A. Voigt

Design of spurious mode-free elliptical ring resonators

  • Technical Paper

Masoud Baghelani, Di Lan, Jing Wang

An EWOD-based micro diluter with high flexibility on dilution ratio

  • Technical Paper

Ying-Bin Wang, Jun-Hao Huang, Meng-Shiue Lee, Cheng-Yeh Huang, Cheng-Sheng Huang, Ichiro Yamashita, Yung-Yi Tu, Wensyang Hsu

Research on the frequency stability of a bonded QCM for dew point measurement

  • Technical Paper

Ningning Lin, Jing Nie, Xiaofeng Meng

Sustained elevation of activity of developing neurons grown on polyimide microelectrode arrays (MEA) in response to ultrasound exposure

  • Technical Paper

Massoud L. Khraiche, William B. Phillips, Nathan Jackson, Jit Muthuswamy

Inkjet-printed antenna on thin PET substrate for dual band Wi-Fi communications

  • Technical Paper

Arshad Hassan, Shawkat Ali, Gul Hassan, Jinho Bae, Chong Hyun Lee

Pressure measurement in a microchannel

  • Technical Paper

Yu-Fen Chu, C. B. Lin, C. S. Chen

High quality factor RF MEMS tunable capacitor

  • Technical Paper

Zewdu Hailu

Complex motion characteristics of three-layered Timoshenko microarches

  • Technical Paper

Mergen H. Ghayesh, Hamed Farokhi, Alireza Gholipour, Shahid Hussain

Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process

  • Technical Paper

Adel Merdassi, Mohamad Nizar Kezzo, Vamsy P. Chodavarapu

Impact of polyimide liner on high-aspect-ratio through-silicon-vias (TSVs): electrical characteristics and copper protrusion

  • Technical Paper

Shiwei Wang, Yangyang Yan, Zhiqiang Cheng, Zhiming Chen, Yingtao Ding

Design, analysis and experimental performance of a piezoelectric rotary actuator based on compliant foot driving

  • Technical Paper

Shupeng Wang, Weibin Rong, Lefeng Wang, Zhichao Pei, Lining Sun

Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators

  • Technical Paper

Zhuo Zhang, Yueqing Yu, Xinyu Liu, Xuping Zhang

Wave propagation behavior of coupled viscoelastic FG-CNTRPC micro plates subjected to electro-magnetic fields surrounded by orthotropic visco-Pasternak foundation

  • Technical Paper

Majid Jamali, Ali Ghorbanpour Arani, Mohammad Mosayyebi, Reza Kolahchi, Rasoul Tarkesh Esfahani

Self-condensation-type direct arylation synthesis of naphthalene bisimide-bithiophene alternating copolymers

  • Technical Paper

Kazuhiro Nakabayashi, Haruka Fukuzawa, Masaya Yamada, Hideharu Mori

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    MKVS GbR/© MKVS GbR, Nordson/© Nordson, ViscoTec/© ViscoTec, BCD Chemie GmbH, Merz+Benteli/© Merz+Benteli, Robatech/© Robatech, Ruderer Klebetechnik GmbH, Xometry Europe GmbH/© Xometry Europe GmbH, Atlas Copco/© Atlas Copco, Sika/© Sika, Medmix/© Medmix, Kisling AG/© Kisling AG, Dosmatix GmbH/© Dosmatix GmbH, Innotech GmbH/© Innotech GmbH, Hilger u. Kern GmbH, VDI Logo/© VDI Wissensforum GmbH, Dr. Fritz Faulhaber GmbH & Co. KG/© Dr. Fritz Faulhaber GmbH & Co. KG, ECHTERHAGE HOLDING GMBH&CO.KG - VSE, mta robotics AG/© mta robotics AG, Bühnen, The MathWorks Deutschland GmbH/© The MathWorks Deutschland GmbH, Spie Rodia/© Spie Rodia, Schenker Hydraulik AG/© Schenker Hydraulik AG