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Microsystem Technologies
Published in: Microsystem Technologies 1/2013

01-01-2013 | Technical Paper

Monolithic integration of Pb(Zr,Ti)O3 thin film based resonators using a complete dry microfabrication process

Authors: Yonggang Jiang, Kensuke Kanda, Yuki Iga, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka

Published in: Microsystem Technologies | Issue 1/2013

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Abstract

Monolithic fabrication of lead zirconate titanate [Pb(Zr,Ti)O3 or PZT] based thin film resonant devices such as microcantilevers, Lamb wave and bulk acoustic wave resonators are demonstrated. High-performance PZT thin films with a thickness of 2.6 μm are prepared on a silicon on insulator wafer by a sputtering deposition process. A highly selective reactive ion etching process is employed for micro-patterning of PZT, platinum electrodes, and SiO2 insulation layer. Self-actuation of the PZT microcantilevers is demonstrated and the frequency response is characterized using a laser Doppler vibrometer. The frequency response of the Lamb wave resonator is evaluated by measuring its transmission characteristic using a network analyzer. For a Lamb wave resonator with a length of 240 μm and an interdigital period of 80 μm, the 1st order and 2nd resonance frequencies are 15.3 and 41.8 MHz, respectively.
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Metadata
Title
Monolithic integration of Pb(Zr,Ti)O3 thin film based resonators using a complete dry microfabrication process
Authors
Yonggang Jiang
Kensuke Kanda
Yuki Iga
Takayuki Fujita
Kohei Higuchi
Kazusuke Maenaka
Publication date
01-01-2013
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 1/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1532-y

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