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Microsystem Technologies
Published in: Microsystem Technologies 8/2011

01-08-2011 | Technical Paper

Multilayer high-aspect-ratio RF coil for NMR applications

Authors: C. Y. Hsieh, Y. T. Yeh, L. S. Fan

Published in: Microsystem Technologies | Issue 8/2011

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Abstract

Microcoils offer a high degree of mass sensitivity and high magnetic field gradient strength in magnetic resonance microscopy applications. This paper presents a novel multilayer high-aspect-ratio metal fabrication process that can be used to fabricate a nanoliter-volume radio frequency (RF) saddle coil with an embedded flow-through fluidic channel for nuclear magnetic resonance (NMR) applications. The fabrication process is based on repeated electroplating processes and structure release processes. The achieved aspect ratio of the developed RF saddle coil is 4 with a structure line width of 25 μm. The resistance of the RF coil and the 1H spectrum line width have been measured and are found to be 0.7 Ω and 350 Hz, respectively. Our results indicate that this novel fabrication process for RF microcoils is feasible for NMR applications.
previous article Design, fabrication, and testing of VDP MEMS pressure sensors
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Metadata
Title
Multilayer high-aspect-ratio RF coil for NMR applications
Authors
C. Y. Hsieh
Y. T. Yeh
L. S. Fan
Publication date
01-08-2011
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 8/2011
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1305-z

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