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Microsystem Technologies
Erschienen in: Microsystem Technologies 8/2011

01.08.2011 | Technical Paper

Multilayer high-aspect-ratio RF coil for NMR applications

verfasst von: C. Y. Hsieh, Y. T. Yeh, L. S. Fan

Erschienen in: Microsystem Technologies | Ausgabe 8/2011

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Abstract

Microcoils offer a high degree of mass sensitivity and high magnetic field gradient strength in magnetic resonance microscopy applications. This paper presents a novel multilayer high-aspect-ratio metal fabrication process that can be used to fabricate a nanoliter-volume radio frequency (RF) saddle coil with an embedded flow-through fluidic channel for nuclear magnetic resonance (NMR) applications. The fabrication process is based on repeated electroplating processes and structure release processes. The achieved aspect ratio of the developed RF saddle coil is 4 with a structure line width of 25 μm. The resistance of the RF coil and the 1H spectrum line width have been measured and are found to be 0.7 Ω and 350 Hz, respectively. Our results indicate that this novel fabrication process for RF microcoils is feasible for NMR applications.
Vorheriger Artikel Design, fabrication, and testing of VDP MEMS pressure sensors
Nächster Artikel Design, fabrication and characterization of piezoelectric micro-cantilever operated in liquid environment for ultrasound energy source applications

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Literatur
Badilita V, Kratt K, Baxan N, Mohmmadzadeh M, Burger T, Weber H, von Elverfeldt D, Hennig J, Korvink JG, Wallrabe U (2010) On-chip three dimensional microcoils for MRI at the microscale. Lab Chip 10:1387–1390CrossRef
Bu M, Melvin T, Ensell GJ, Wilkinson JS, Evans AGR (2004) A new masking technology for deep glass etching and its microfluidic application. Sens Actuators A Phys 115:476–482CrossRef
Demas V, Herberg JL, Malba V, Bernhardt A, Evans L, Harvey C, Chinn SC, Maxwell RS, Reimer J (2007) Portable, low-cost NMR with laser-lathe lithography produced microcoils. J Magn Reson 189:121–129CrossRef
Ehrmann K, Saillen N, Vincent F, Stettler M, Jordan M, Wurm FM, Besse P-A, Popovic R (2007) Microfabricated solenoids and Helmholtz coils for NMR spectroscopy of mammalian cells. Lab Chip 7:373–380CrossRef
Ginsberg DM, Melchner MJ (1970) Optimum geometry of saddle shaped coils for generating a uniform magnetic field. Rev Sci Instrum 41:122–123CrossRef
Goto S, Matsunaga T, Matsuoka Y, Kuroda K, Esashi M, Haga Y (2007) Development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates. In: IEEE MEMS 2007, Kobe, Japan, 21–25 January 2007, pp 329–332
Iliescu C, Jing J, Tay FEH, Miao J, Sun T (2005) Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution. Surf Coat Technol 198:314–318CrossRef
Jackman RJ, Brittain ST, Whitesides GM (1998) Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates. J Microelectromech Syst 7:261–266CrossRef
Jiang YG, Ono T, Esashi M (2006) High aspect ratio spiral microcoils fabricated by a silicon lost molding technique. J Micromech Microeng 16:1057–1061CrossRef
Kim Y, Llamas-Garro I, Baek CW, Kim JM, Kim YK (2009) New release technique of a thick sacrificial layer and residue effects on novel half-coaxial transmission line filters. J Micromech Microeng 19:1–6
Lacey ME, Subramanian R, Olson DL, Webb AG, Sweedler JV (1999) High-resolution NMR spectroscopy of sample volumes from 1 nL to 10 μL. Chem Rev 99(10):3133–3152CrossRef
Li Y, Ahmad MM, Hand JW, Syms RRA, Gilderdale D, Collins DJ, Young IR (2007) Microcoils on structured silicon substrates for magnetic resonance detection. IEEE Sens J 7(9):1362–1369CrossRef
Malba V, Maxwell R, Evans LB, Bernhardt AF, Cosman M, Yan K (2003) Laser-lathe lithography—a novel method for manufacturing nuclear magnetic resonance microcoils. Biomed Microdevices 5(1):21–27CrossRef
Massin C, Vincent F, Homsy A, Ehrmann K, Boero G, Besse P-A, Daridon A, Verpoorte E, de Rooij NF, Popovic RS (2003) Planar microcoil-based microfluidic NMR probes. J Magn Reson 164:242–255CrossRef
Olson DL, Peck TL, Webb AG, Magin RL, Sweedler JV (1995) High-resolution microcoil 1H-NMR for mass-limited, nanoliter-volume samples. Science 270:1967CrossRef
Olson DL, Lacey ME, Sweedler JV (1998) High-resolution microcoil NMR for analysis of mass-limited, nanoliter samples. Anal Chem 70:645–650CrossRef
Seeber DA, Hoftiezer JH, Daniel WB, Rutgers MA, Pennington CH (2000) Triaxial magnetic field gradient system for microcoil magnetic resonance imaging. Rev Sci Instrum 71:4263–4272CrossRef
Song JS, Lee S, Jung SH, Cha GC, Mun MS (2009) Improved biocompatibility of parylene-C files prepared by chemical vapor deposition and the subsequent plasma treatment. J Appl Polym Sci 112:3677–3685CrossRef
Woytasik M, Ginefri JC, Raynaud JS, Poirier-Quinot M, Dufour-Gergam E, Grandchamp J, Girard O, Robert P, Gilles JP, Martincic E, Darrasse L (2007) Characterization of flexible RF microcoils dedicated to local MRI. Microsyst Technol 13:1575–1580CrossRef
Metadaten
Titel
Multilayer high-aspect-ratio RF coil for NMR applications
verfasst von
C. Y. Hsieh
Y. T. Yeh
L. S. Fan
Publikationsdatum
01.08.2011
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 8/2011
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1305-z

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