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Semiconductors
Published in: Semiconductors 16/2019

01-12-2019 | NANOSTRUCTURES TECHNOLOGY

Femtosecond Laser-Induced Periodical Nanomodification of Surface Composition

Authors: A. A. Ionin, S. I. Kudryashov, S. V. Makarov

Published in: Semiconductors | Issue 16/2019

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Abstract

Nanoscale periodical chemical composition modification of different two-component compound materials GaAs, CdTe, W0.5C and TiC was realized for the first time through multi-shot femtosecond laser irradiation of their surfaces. The resulting surface modification represents periodical nanoscale ripples with different chemical composition in valleys and ridges. The underlying mechanism is related to a sequence of elementary processes, such as laser excitation surface plasmon-polariton, their interference with the incident laser radiation, inhomogeneous surface heating and incongruent cavitation-like material removal. The latter mechanism is responsible for higher evaporation rate of the components with higher volatility, resulting in growth of surface concentration of low-volatility components.
previous article Synthesis and Comparison of the Electrical Properties of Polyaniline and Poly[(N-2-hydroxyethyl)aniline]
next article Etching of Disc and Ring Patterns in Si3N4/GaN Structure by Ga+ FIB

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Metadata
Title
Femtosecond Laser-Induced Periodical Nanomodification of Surface Composition
Authors
A. A. Ionin
S. I. Kudryashov
S. V. Makarov
Publication date
01-12-2019
Publisher
Pleiades Publishing
Published in
Semiconductors / Issue 16/2019
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S106378261912011X

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