Issue 1/2007
Content (14 Articles)
Technical Paper
Design of near-field recording optics using truncated hemispherical SIL with cover-layer incident dual recording layers
Wan-Chin Kim, Hyun Choi, TaeSun Song, No-Cheol Park, Young-Pil Park, Jin-Eui Lee
Technical Paper
Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
Bangtao Chen, Jianmin Miao, Francis E. H. Tay
Technical Paper
Topology optimization of a swing arm type actuator using the response surface method
Jeonghoon Yoo, Choong-Yong Lee
Technical Paper
Thermal and flow analysis of a magneto-hydrodynamic micropump
Hamzeh Duwairi, Mustafa Abdullah
Technical Paper
Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment
Chengkuo Lee
Technical Paper
Influences of interface oxidation on transmission laser bonding of wafers for microsystem packaging
Ampere A. Tseng, Jong-Seung Park, George P. Vakanas, Hongtao Wu, Miroslav Raudensky, T. P. Chen
Technical Paper
Analysis of the dynamic behaviour of a torsional micro-mirror
Dong-Ming Sun, Wei Dong, Cai-Xia Liu, Wei-You Chen, Michael Kraft
Technical Paper
Surface characterization and friction of a bio-inspired reversible adhesive tape
Bharat Bhushan, Robert A. Sayer
Technical Paper
Surface micromachined high-performance RF MEMS inductors
Dong-Ming Fang, Yong Zhou, Xi-Ning Wang, Xiao-Lin Zhao
Technical Paper
Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques
R. A. Lawes
Technical Paper
Power consumption analysis of surface acoustic wave sensor systems using ANSYS and PSPICE
Yi Liu, Tianhong Cui
Technical Paper
Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach
Mohammad Yeakub Ali, Yee Wei Loo
Technical Paper
Thermal trajectory control for micro RT-PCR biochips
Nan-Chyuan Tsai, Chung-Yang Sue
Technical Paper
2D- and 3D-transmission electron microscopy and optical microscopy in powder-based micro components
Johannes Böhm, Martin Beck, Jürgen Hausselt