Issue 12/2010
Content (17 Articles)
High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology
Ji-Hong Kim, Sung-Min Hong, Byung-Moo Moon, Kunnyun Kim
E-beam lithography of nano-interdigital transducers on insulating and semiconducting substrates
G. F. Iriarte
Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining
Hyun-Jun Kwon, Woo-Chang Choi
The effects of metal particle size and distributions on dimensional accuracy for micro parts in micro metal injection molding
Kenji Okubo, Shigeo Tanaka, Hiroshi Ito
Bonding of planar poly (methyl methacrylate) (PMMA) nanofluidic channels using thermal assisted ultrasonic bonding method
Zongbo Zhang, Yi Luo, Xiaodong Wang, Shengqiang He, Fantao Meng, Liding Wang
Microfluidics-based immunoassays by using an integrated fluorescence detection system
Xing Chen, Dafu Cui, Hui Li, Haoyuan Cai, Jianhan Sun, Jian Chen
Design of an SOI-MEMS high resolution capacitive type single axis accelerometer
Kalyan Kumar Mistry, K. B. M. Swamy, Siddhartha Sen
Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section
A. L. Herrera-May, L. A. Aguilera-Cortés, P. J. García-Ramírez, H. Plascencia-Mora, M. Torres-Cisneros
Influence of tool fabrication process on characteristics of hot embossed polymer microfluidic chips for electrospray
Sana Malahat, Pio G. Iovenitti, Igor Sbarski
Performance characterization of drop-on-demand micro-dispensing system with multi-printheads
J. Sun, R. Yang, K. K. Tan, J. Y. H. Fuh, Y. S. Wong, J. H. Ng
Fabrication of microfluidic device channel using a photopolymer for colloidal particle separation
Nurul Amziah Md Yunus, Nicolas G. Green
A water-tight packaging of MEMS electrostatic actuators for biomedical applications
M. A. Erismis, H. Pereira Neves, P. De Moor, R. Puers, C. Van Hoof
Length-dependent photoinduced current in vertically-aligned MWNTs forests
Jie Zhang, Yingqi Jiang, Pengbo Wang, Hailong Tian
Electrostatically driven tunable radio frequency inductor
Dong-Ming Fang, Quan Yuan, Xiu-Han Li, Hai-Xia Zhang
Ring shape anchored RF MEMS contour mode disk resonator for UHF communication applications
Masoud Baghelani, Habib Badri Ghavifekr
An experimental analysis of electrostatically vibrated array of polysilicon cantilevers
S. Chakraborty, K. B. M. Swamy, S. Sen, T. K. Bhattacharyya