Issue 4-5/2005
Content (29 Articles)
3D microstructure fabrication for a high luminosity lighting-panel for LCD using synchrotron radiation
M. Minamitani, Y. Utsumi, T. Hattori
Improvement of capillary electrophoresis property for microchannels fabricated by deep X-ray lithography
Y. Utsumi, M. Ozaki, S. Terabe, T. Hattori
MODULIGA: The LIGA process as a modular production method-current standardization status in Germany
L. Hahn, P. Meyer, K. Bade, H. Hein, J. Schulz, B. Löchel, H.U. Scheunemann, D. Schondelmaier, L. Singleton
Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals
A. Schoth, R. Förster, W. Menz
Knowledge-based design environment for primary shaped micro parts
A. Albers, N. Burkardt, S. Hauser, J. Marz
The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structure
Y. Tian, P. Zhang, G. Liu, X. Tian
Simulation of deep UV lithography with SU-8 resist by using 365 nm light source
X. Tian, G. Liu, Y. Tian, P. Zhang, X. Zhang
Fabrication of ceramic microcomponents using deep X-ray lithography
C. Müller, T. Hanemann, G. Wiche, C. Kumar, J. Goettert
Fabrication of diamond micro tools for ultra precision machining
E. Ritzhaupt-Kleissl, C. Müller, A. Sossalla, S. Ertl, P. Gluche
Carbon paper flow fields made by WEDM for small fuel cells
M. A. Müller, C. Müller, R. Förster, W. Menz
LIGA fabrication of X-ray Nickel lenses
V. Nazmov, E. Reznikova, A. Snigirev, I. Snigireva, M. DiMichiel, M. Grigoriev, J. Mohr, B. Matthis, V. Saile
Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures
M. S. Kennedy, A. L. Olson, J. C. Raupp, N. R. Moody, D. F. Bahr
Optimisation of SU-8 processing parameters for deep X-ray lithography
R. L. Barber, M. K. Ghantasala, R. Divan, K. D. Vora, E. C. Harvey, D. C. Mancini
Fabrication of microneedle array using LIGA and hot embossing process
Sang Jun Moon, Seung S. Lee, H. S. Lee, T. H. Kwon
Corrosion behavior of a structural nickel electrodeposit
F. D. Wall, M. A. Martinez, J. J. Vandenavyle
Experimental study of NiFe and CoFe throughmask electrodeposition of high aspect ratio features
J. J. Kelly, N. Y. C. Yang
Design and simulation of an asymmetric variable reluctance stepping millimotor
W.-Y. Lu, E.J. Garcia, W.H. Greenwood, A.D. Oliver, J.S. Korellis
Fabrication of high-aspect-ratio hydrogel microstructures
V. R. Tirumala, R. Divan, D. C. Mancini, G. T. Caneba
Effects of contact-stress on hot-embossed PMMA microchannel wall profile
K. F. Lei, W. J. Li, Y. Yam
Application of 3D gray mask for the fabrication of curved SU-8 structures
Kuo-Yung Hung, Fan-Gang Tseng, Hwai-Pwu Chou
Low cost transparent SU-8 membrane mask for deep X-ray lithography
S. Cabrini, F. Pérennès, B. Marmiroli, A. Olivo, A. Carpentiero, R. Kumar, P. Candeloro, E.Di. Fabrizio
Micro-Structures of TiC/Ti5Si3 composite produced by powder metallurgy and LIGA process
N. Miyano, H. Iwasa, M. Matsumoto, K. Ameyama, S. Sugiyama
Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
G. Aigeldinger, J. T. Ceremuga, D. M. Skala